changes.mady.by.user Wirth, Justin C
Saved on May 10, 2024
Saved on May 16, 2024
Status
DOWNUP
Issue Date and Description06 May 2024 Extended electrical shutdown necessary for JEOL 2 install
Estimated Fix Date and Comment
16 May 2024 System should be available and calibrated by 5 PM.
Responding StaffJustin Wirth
iLab Name
JEOL JBX-8100FS E-Beam Writer
iLab Kiosk
BRK Lithography Core
FIC
Shared
Owner
Bill Rowe and Justin Wirth (Email, Chat)
Location
BRK 2100P
Max. Wafer
6"/150 mm
Info Links
SOP | Internal | /wiki/spaces/BNCWiki/pages/6232164
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