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Page Properties
idInfo

iLab Name

JEOL JBX-8100FS E-Beam Writer

iLab Kiosk

BRK Lithography Core

FIC

Shared

Owner

Bill Rowe and Justin Wirth (Email, Chat)

Location

BRK 2100P

Max. Wafer

6"/150 mm

Info Links

SOPInternal/wiki/spaces/BNCWiki/pages/6232164

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