2025-12-20 to 2025-01-02:  Reduced Holiday Operations

Due to Purdue’s Winter Recess   hazardous gases will be unavailable from 3:30 PM Friday, December 20^th until 20th until 8:00 AM on Thursday, Jan 2^nd2nd.   Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the “buddy” system).  Please note the following changes to our normal operation:

o   ALD sources will remain available

Unavailable gases:

·         Ammonia (NH3)

·         Boron trichloride  (BCl3) 

·         Chlorine (Cl2)

·         Dichlorosilane  (H2Cl2Si)

·         Hydrogen  (H2)

·         Hydrogen Sulfide  (H2S)

·         Krypton Fluoride  (KrF)

·         Methane  (CH4)

·         Nitric Oxide  (NO)

·         Silane  (SiH4)

·         Trichlorosilane  (HCl3Si)

Tools affected:

·         Reduced capability:

o   PVD Nitride Sputtering System  (NH3 unavailable)

o   Tube 1 Clean Ox  (H2 unavailable, dry oxidation only)

o   Tube 4 Field OX  (H2 unavailable, dry oxidation only)

o   Tube 7 General Oxidation  (H2 unavailable, dry oxidation only)

o   Panasonic  (Cl2 and BCl3 unavailable)

o   Plasma-Therm Apex SLR ICP RIE Etcher (H2, Cl2 and BCl3 unavailable)

·         Shutdown:

o   Axic PECVD  (NH3 & SiH4 unavailable)

o   Easy Tube 3000 DVD  (CH4 unavailable)

o   Epigress  (SiH4 unavailable)

o   H2S CVD  (H2S & H2 unavailable)

o   Nitric Oxide Anneal  (NO unavailable)

o   Plasma-Therm Apex SLR HDPCVD  (SiH4 unavailable)

o   Tube 2 Nitride  (NH3 and HCl3Si unavailable)

o   Tube 3 LTO  (SiH4 unavailable)

o   Tube 6 Polysilicon  (SiH4 unavailable)

·           Work with highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times.         

·          Custodial staff will not be working.

·         There will be no restocking of shared use supplies.

·         There will be no availability of engineering staff to answer questions or repair down equipment. 

o   On metallization tools sources will not be changed and depositions must be < 200 nm.

• “Preliminary” reservations that require staff approval will not be approved during this time.

Contact Steve Jurss (sejurss@purdue.edu) with any questions.