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List of pages to be added:
- Edge bead Removal
- Pre-exposure bake
- Post-exposure bake
- Multilayer spins
- Characterization of spun films
- Etch resistance
ECE 695Q - Nanometer Scale Patterning and Processing: https://nanohub.org/resources/24028
Lithographic Processing Overview:
ICs, Lithography, and Photoresist - Henderson Research Group, GA Tech
University Nanofabrication/Cleanroom resources:
- UPenn - Singh Center for Nanotechnology
- nanoFAB - University of Alberta
- CMI - EPFL
- University of Utah - Nanofab
- UC Irvine - INRF
- University of Louisville - Micro/Nano Technology Center
- RPI - Micro and Nano Fabrication Clean Room
- RIT - Semiconductor and Microsystems Fabrication Laboratory
Manufacturer resources: