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Standard Operating Procedure (SOP):
The document below explains how to minimize the reflected power manually when the tool cannot do it automatically.
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Overview
Section
Subsection
Sub-subsection
References
Spare Parts Sourcing
| Description | Vendor | Part Number | Datasheet | Image |
|---|---|---|---|---|
| Chamber Lid Closed Switch | Digikey | GH1365-ND | http://www.grayhill.com/assets/1/7/Push_30.pdf |
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| Pressure Manometer | MKS Instruments | 122A Abs. Manometer (Current) 622C Abs. Manometer (Recommended Replacement) |
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