iLab Name: Cleanroom Probe 1
iLab Kiosk: BRK Characterization Core
FIC: Shared
Owner: Nithin Raghunathan
Location: BRK 2261
Maximum Wafer Size: 4"/100 mm

Overview

General Description

Probe Station I consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. The test equipment consists of an Keithley SCS4200 Semiconductor Parameter Analyzer, an HP 4284A LCR meter. A Windows-NT PC running Labview is used to drive the instruments and collect the data.

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References