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Page Properties
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Insert excerpt
Problem Reporting Guide
Problem Reporting Guide
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StatusInstallingUp
Issue Date and Description


Estimated Fix Date and Comment

Responding StaffFrancis




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iLab Name


iLab Kiosk


FIC


Owner


Location


Max. Wafer


Internal Page
Staff Page




Table of Content Zone
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Table of Contents
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Overview

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TypeMaterialsRestricted MaterialsAvailable GasesMax RF PowerWafer Size
ICP RIESi, Oxides, III-IV's, Ti, Al, SiCAu, Ag, Pt, CuAr, CHF3, CF4, SF6, Cl2, N2, O2, BCl3, H2, C4F82000 ICP / 600 Platen6 inch (150 mm) SEMI Specification



General Description

Tip

This is an example of a tip


Warning

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Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure

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nameSOP-V14.pdf
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View file
nameFM - Recipe Writing - J.pdf
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Questions & Troubleshooting



Process Library

References