View Page
Export to PDF
Page history
View ownership
Page Information
View Source
Content
…
BNC Wiki Home
Characterization
Electron Microscopy
Sample Prep
SPI Sputter and Carbon Coaters for SEM
Page Comparison
View Page
Export to PDF
Page history
View ownership
Page Information
View Source
Versions Compared
Old Version
4
changes.mady.by.user
Joon Hyeong Park
Saved on
Jun 23, 2021
compared with
New Version
5
changes.mady.by.user
Joon Hyeong Park
Saved on
Jun 23, 2021
Previous Change: Difference between versions 3 and 4
Next Change: Difference between versions 5 and 6
View Page History
Key
This line was added.
This line was removed.
Formatting was changed.
...
SPI Supplies:
https://www.2spi.com/category/coating-systems-rp/sputter-carbon-coaters/
Needle Valve (Gas Leak Valve at Vacuum Control Base):
11425N-AB or VM31/1
O-rings for Pyrex Chamber:
11458-AB
or VM24/1
Documents
Manual for Vacuum Control Base Module
Manual for Sputter Module
Manual for Carbon Coater Module
...
General
Content
Integrations
{"serverDuration": 247, "requestCorrelationId": "3f0b24843b094fa2b44ce1cef5027ef2"}