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Dry Oxide Only from to |
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iLab Name: C - Tube 04 Field Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)
Wet Oxidation will be down from 12/18/2020 to 1/4/2021 for winter shutdown due to H2 content. Dry oxidation is fine.
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Overview
General Description
Horizontal furnaces for a variety of processes.
Specifications
Process Capabilities:
- Tube 04 - Wet / Dry Oxidation (For general use)
Process Temperatures:
- Tube 04 - 1100°C maximum
Technology Overview
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library