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Problem Reporting Guide
Problem Reporting Guide
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Issue Date and Description

No wet oxidation (TGMS - Hydrogen)

Estimated Fix Date and Comment


Responding Staff


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e-Log Link - Protemp Horizontal Furnaces
e-Log Link - Protemp Horizontal Furnaces
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iLab Name: C - Tube 01 Clean Ox
iLab Kiosk: BRK Furnace Core
FIC:
 Shared
Owner: Rich Hosler
Location:
Cleanroom - R Bay
Maximum Wafer Size: 
6"/150 mm


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Overview

General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 01 - Wet / Dry Oxidation (Super-Clean Si users only)

Process Temperatures:

  • Tube 01 - 1100°C maximum

All furnace tubes are capable of samples up to 6 inches in diameter.

Technology Overview 


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library


References