Versions Compared

Old Version 38

changes.mady.by.user Hosler, Richard S

Saved on

compared with

New Version 39

changes.mady.by.user Hosler, Richard S

Saved on

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.


Page Properties
idFunctionality

Insert excerpt
Problem Reporting Guide
Problem Reporting Guide
nopaneltrue

StatusUP
Issue Date and Description


Estimated Fix Date and Comment


Responding Staff


Insert excerpt
e-Log Link - Protemp Horizontal Furnaces
e-Log Link - Protemp Horizontal Furnaces
nopaneltrue


Between 12/22/22 15:30 to 1/3/23 08:30 this tube is to be used for DRY O2 Oxidation only!

No H2 Usage due to holiday reduced operations.


iLab Name: C - Tube 01 Clean Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm


Table of Content Zone
locationtop
styledisc

Table of Contents
outlinetrue
indent25px
stylenone


Overview

General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 01 - Wet / Dry Oxidation (Super-Clean Si users only)

Process Temperatures:

  • Tube 01 - 1100°C maximum

All furnace tubes are capable of samples up to 6 inches in diameter.

Technology Overview 


Sample Requirements and Preparation


Standard Operating Procedure

Widget Connector
urlhttp://youtube.com/watch?v=cvJ9GNvxZF4
 - Thermal Oxidation


Questions & Troubleshooting



Process Library

References