2025-12-

20 to

2025-01-02:  Reduced Holiday Operations

Due to Purdue’s Winter Recess hazardous gases will be unavailable from 3:30 PM

Friday, December

20th until 8:00 AM on

Thursday, Jan 2nd.

Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the “buddy” system).

  Please note the following changes to our normal operation:

o   ALD sources will remain available

Unavailable gases:

·         Ammonia (NH3)

·         Boron

trichloride  (BCl3) 

·         Chlorine (Cl2)

·         Dichlorosilane  (H2Cl2Si)

·         Hydrogen  (H2)

·         Hydrogen

Sulfide  (H2S)

·         Krypton

Fluoride  (KrF)

·         Methane  (CH4)

·         Nitric

Oxide  (NO)

·         Silane  (SiH4)

·         Trichlorosilane  (HCl3Si)

Tools affected:

·         Reduced capability:

o   PVD Nitride Sputtering

System  (NH3 unavailable)

o   Tube 1 Clean

Ox  (H2 unavailable, dry oxidation only)

o   Tube 4 Field

OX  (H2 unavailable, dry oxidation only)

o   Tube 7 General

Oxidation  (H2 unavailable, dry oxidation only)

o   Panasonic  (Cl2 and BCl3 unavailable)

o   Plasma-Therm Apex SLR ICP RIE Etcher (H2, Cl2 and BCl3 unavailable)

·         Shutdown:

o   Axic

PECVD  (NH3 & SiH4 unavailable)

o   Easy Tube 3000

DVD  (CH4 unavailable)

o   Epigress  (SiH4 unavailable)

o   H2S

CVD  (H2S & H2 unavailable)

o   Nitric Oxide

Anneal  (NO unavailable)

o   Plasma-Therm Apex SLR

HDPCVD  (SiH4 unavailable)

o   Tube 2

Nitride  (NH3 and HCl3Si unavailable)

o   Tube 3

LTO  (SiH4 unavailable)

o   Tube 6

Polysilicon  (SiH4 unavailable)

· Work with highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times.         

· Custodial staff will not be working.

·There will be no restocking of shared use supplies.

·There will be no availability of engineering staff to answer questions or repair down equipment. 

o   On metallization tools sources will not be changed and depositions must be < 200 nm.

• “Preliminary” reservations that require staff approval will not be approved during this time.

Contact Steve Jurss (

sejurss@purdue.edu) with any questions.