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Problem Reporting Guide
Problem Reporting Guide
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e-Log Link - Protemp Horizontal Furnaces
e-Log Link - Protemp Horizontal Furnaces
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Protemp Horizontal Furnace - Tube 01 - RCA Clean Oxidation

iLab Name: C - Tube 01 Clean Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm


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Overview

General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 01 - Wet / Dry Oxidation (Super-Clean Si users only)

Process Temperatures:

  • Tube 01 - 1100°C maximum

All furnace tubes are capable of samples up to 6 inches in diameter.

Technology Overview 

 

Sample Requirements and Preparation

 

Standard Operating Procedure

Questions & Troubleshooting

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Process Library

References

 

urlhttp://youtube.com/watch?v=cvJ9GNvxZF4
 - Thermal Oxidation