Versions Compared

Old Version 11

changes.mady.by.user Hosler, Richard S

Saved on

compared with

New Version Current

changes.mady.by.user Hosler, Richard S

Saved on

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.


Page Properties
idFunctionality

Insert excerpt
Problem Reporting Guide
Problem Reporting Guide
nopaneltrue

StatusUPMAINT
Issue Date and Description

 

Estimated Fix Date and Comment
 10am  - Cleanroom maintenance next to furnace
Responding StaffR. Hosler


Insert excerpt
e-Log Link - Protemp Horizontal Furnaces
e-Log Link - Protemp Horizontal Furnaces
nopaneltrue

Protemp Horizontal Furnace - Tube 05 - Anneal

iLab Name: C - Tube 05 Anneal
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)

*** Forming gas in this tool is 4% H2 and balance Ar instead of the usual N2 ***

Table of Content Zone
locationtop
styledisc

Table of Contents
outlinetrue
indent25px
stylenone


Overview


General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 05 - Anneal

Process Temperatures:

  • Tube 05 - 1100°C maximum