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- SPI Supplies: https://www.2spi.com/category/coating-systems-rp/sputter-carbon-coaters/
- Needle Valve (Gas Leak Valve at Vacuum Control Base): https://www.2spi.com/item/11425n-ab/coating-systems-rp/11425N-AB or VM31/1
- O-rings : https://www.2spi.com/item/11458-ab/coating-systems-rp/for Pyrex Chamber: 11458-AB or VM24/1
Documents
- SPI Manual for Vacuum Control Base Module
- SPI Manual for Sputter Module
- SPI Manual for Carbon Coater Module
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