Training General 

1. Get to your equipment training 5 minutes early.  Staff do not want to wait on you to gown up / get notebook / find the right area / etc.
2. If you cannot attend a training at the last minute, email the staff member.  That is better than not doing anything.
3. Generally speaking, all equipment trainings occur at the machine.  If in doubt, ask the staff member when you sign up for training.  
4. Ask staff for any and all help.  We are here to help you.
5. Come down to the staff office and introduce yourself.  It is nice to make a relationship with you, and that will excel you in your research.
6. Take notes when you are being trained.  
7. Be prepared for your equipment training.  Know what you want the machine to do, or achieve.
8. Request training so that you'll be trained close to when you actually need to use the machine. Getting trained on a machine more than a few weeks before you'll actually use it will leave you unfamiliar with the tool.

Cleanroom Usage General

Cleanroom Hood Safety

1. Solvent hood: Chemical/splash goggles and latex gloves.
2. Acid hood: Orange acid gloves, acid gown, and chemical/splash goggles. A face shield is required when pouring chemicals or using HF/BOE.

Solvent Hood Use

1. Sign in when you get to a hood , and out when you leave
2. Hood should be free of wipes and chemicals.
1. Exception is properly labeled chemicals in back of hood, and a single small (<10) stack of dry, unused wipes on opposite side of hood from sink.
3. Daily use bottles are for spraying only, don't trust them for soaks and sonication.
4. For soaks/sonication, pour from below the supply cabinet.
1. These are CLEAN.
5. Daily use bottles shouldn't be removed from hood.
1. If they don't appear to work, check under the lid. If it is genuinely cracked, dry it and get a new bottle from supply room, disposing of gloves and getting a new set.
6. Finish a bottle completely, (can optionally sit on wipe), then blow dry, then place in bin and label with "cleaned" label.
1. Solvent bottle get a triple air rinse, aqueous developer gets a triple water rinse.
2. Cap gets dried and thrown in trash.
7. Get new bottles from the supply cabinet
1. Use a carrier, or two hands if bottle doesn’t fit securely in carrier.
8. Place back under hood or back in supply cabinet when done
1. Contamination issue and explosive hazard of not.
9. Supply room.
1. CR wipes, Pipettes, Pens, etc
10. If you're not at the hood, chemicals need to be labeled and pushed to the back.
1. Labeled on wipe (or pre-printed label) with:
1. your name
2. your research group
3. the chemical
4. the time you left the liquid
5. your planned return time.
2. If solvent, liquid needs to be covered with foil or an evaporating dish.
3. Extended processes may be done for up to 72 hrs
4. Email me if you need longer
5. Unlabeled chemicals, samples, or glassware is considered both trash and a safety hazard, and will be disposed of.
11. Halogenated vs nonhalogenated waste.
12. Basic developers go down drain
13. Prohibited chemicals in spinner area:
1. Remover PG
2. PRS2000
3. HMDS.
14. Cleanliness violations are on a 3 strikes system
1. We DO understand mistakes and forgetfulness happen.
15. When finished in hood:
1. Clean up any chemicals on the hood surface
2. Dispose of wipes
3. Reset the daily use bottles.
4. Store any chemical bottles under the hood or in the cabined.
5. Sign out.

Acid Hood Usage

Proper Orientation for Acid Hood gloves:

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Proper Orientation for Acid Gown:

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1. Acid hood general
1. Sign in when you get to a hood , and out when you leave
2. Hood should be free of wipes and chemicals.
1. Exception is properly labeled chemicals in back of hood, and a single small (<10) stack of dry, unused wipes on opposite side of hood from sink.
3. Finish a bottle completely, (can optionally sit on wipe), then triple rinse in DI H₂O, then dry with a wipe/N2 gun, then place in bin and label with "cleaned" label.
1. Cap gets dried and thrown in trash.
4. Get new bottles from the supply cabinet using a chemical carrier
5. Place back under hood or back in supply cabinet when done
   
   1. Contamination issue and explosive hazard if not.
6. The supply room has extra CR wipes, Pipettes, Pens, etc if needed. Do not touch the door with acid gloves.
7. If you're not at the hood, chemicals need to be labeled and pushed to the back.
1. Labeled on wipe (or pre-printed label) with:
1. your name
2. your research group
3. the chemical
4. the time you left the liquid
5. your planned return time.
2. Extended processes may be done for up to 72 hrs
3. Unlabeled chemicals, samples, or glassware is considered both trash and a safety hazard, and will be disposed of.
8. Acid and base waste goes down the drain, with LOTS of DI water
   
   1. Let any heated solutions cool to about 40 C before pouring down the drain.
   2. Any solutions containing heavy metals need to be removed of separately.
9. When finished in hood:
1. Clean up any chemicals on the hood surface
2. Dispose of wipes
3. Reset the daily use bottles.
4. Store any chemical bottles under the hood or in the cabinet.
5. Sign out.

Current Procedures and Resources

General Safety Overview

Lab Courtesy

Laboratory Fume Hood Training Summary.doc

BNC Code of Conduct

Operating Policy and Procedures (2012)

REM Chemical Hygiene Plan

BNC 150 Slides

BNC 202 Slides

Emergencies

Building Emergency Plan

All BNC occupants and user must be familiar with the BNC Emergency Plan. The current version is posted here: https://www.purdue.edu/discoverypark/birck/files/BNC%20Building%20Emergency%20Plan_2-6-18.pdf

Lab Safety Emergencies

In the event of a medical emergency, personal injury, fire, explosion, or other serious incident, Call 911 or use an emergency call box to report the incident.

1. Laboratory Spills

   1. A liquid chemical spill is defined as the release of a finite amount of liquid outside its primary and secondary containment. For example, a beaker of a chemical tipping over inside a hood that is fully contained by the hood is not a spill. Conversely, if the beaker tips over in such a way that liquid runs down the front of the hood that is a spill.

   2. All spills in the laboratory (including spills of biological materials) must be reported to a Laboratory Staff member immediately. 

      1. If a staff member cannot be found in person, dial 63333 from a campus phone, or 765-496-3333 on a cell phone

   3. After reporting to BNC staff, spills of < 1 gallon (4 liters) of non-hazardous chemicals may be cleaned by researchers with the help of a spill cart.

      1. Spill carts are located in galleys, designed for spills < 1 gallon.

      2. Use appropriate PPE for the chemical spilled

      3. Use sorbent pad for acids/bases and solvents

      4. Spill booms can be used for material headed under the door

      5. pH paper is available for unknown materials

   4. For spills greater than 1 gallon (4 liters) or any spills of hazardous chemicals, staff assistance is needed. Dial 63333 from a campus phone, or 765-496-3333 on a cell phone.

2. Bodily Fluid Spills

   1. Do not try to clean up bodily fluid spills. Follow the Purdue University Blood-bourne Pathogens procedures

   2. In the event of a Medical Emergency

      1. Call 911 or use the Emergency Call Box to report the incident.

      2. Don't move the victim unless safety dictates

3. Emergency contact information

   1. Personal injury, fire/explosion - Dial 911

   2. For Staff assistance, dial 63333 from a campus phone, or 765-496-3333 on a cell phone.

   3. Door postings contain hazard assessment and staff contact info

      1. Each lab is required to have a hazard assessment which identifies hazards and required PPE.

      2. This posting also includes Emergency Numbers and staff contact information.

4. HF First Aid

   1. Plastic tub with lid and emergency procedure inside.

   2. Decontamination rinse is in small refrigerator in galley marked “First Aid HF Decontamination Solution only! 0.13% Benzalkonium Chloride"

   3. Galley - Location of refrigerator for Benzalkonium Chloride, SDS locations and spill carts and fire extinguishers. Emergency call 911

Shared Use Model

1. BNC is a shared use, multi-user facility without "ownership" of laboratory space. Researchers (undergraduate, graduate, post-doctoral, faculty, staff, and those external to the university) who work in shared use labs, or interact with shared use equipment, are collectively referred to as "users" of BNC. Given the shared nature of the facility, all users are expected to keep other users in mind when using shared labs and tools. 

2. All of the labs and many of the tools in BNC are shared, with usage charged based on a recharge model designed to break-even. The cost to use a recharge tool or lab is based on: 

   1. necessary supplies and expenses for tool use and upkeep, including consumables, equipment service contracts, and repairs/maintenance due to wear and tear

   2. the cost of employee tool/lab support

   3. the depreciation cost of the original cost of the equipment (if applicable) 

   4. the number of annual uses

3. In order to keep costs low for everyone in the BNC community, all users are expected to be diligent in their use of shared tools/labs, to be mindful of the proper way to operate a tool, to be mindful of policies and protocols associated with a particular lab, to be mindful of any material restrictions in a tool/lab, and to limit their reservations of tools to times they will actually be using the tools.
4. Recharge costs are charged directly to users and their associated accounts based on actual usage of tools or labs, with the definition of a "use" depending on the particular tool or space. 
5. Initial building, laboratory, and cleanroom training are included in lab access, and not charged separately.

6. Costs incurred by, and identifiable to, a specific user and project are direct charges, and will be charged by the particular user/account. These include:

   1. use of recharge tools/labs 

   2. training, which includes:

      1. initial tool training time

      2. any necessary retraining of users on tools or in labs due to recharge tool/lab use inconsistent with the tool standard operating procedure or lab policy.

   3. core services, which include: 

      1. staff processing or extended staff consultation

      2. staff support or installation of non-recharge tools

      3. repair or maintenance costs due to recharge tool/labs use inconsistent with the tool standard operating procedure or lab policy. 
      4. identification and notification of users/accounts in cases of recharge tool/lab use inconsistent with the tool standard operating procedure or lab policy.

   4. Pass-through charges: Commercially available items sold by BNC to users at cost are "pass-through" items. These include items in the BNC Store Room, as well as precious metals in deposition systems.

   
   

Fume Hoods

Due to the extreme danger presented by common semiconductor processing chemicals (particularly HF/BOE and TMAH), chemical use in BNC is heavily regulated. All open liquids must be kept in a fume hood. No "benchtop" chemistry may be performed under any circumstances, even if the chemicals are not dangerous. The general rule is: "If it can spill, it needs to be done in the hood".

For chemical compatibility and safety reasons, all fume hoods in BNC are segregated into "Acid" (Acid/Base/Aqueous) or "Solvent" (Solvents/Commercial Photoresist Developers) hoods. Solvents may never be used in Acid hoods, and Acids may never be used in Solvent hoods. Any questions about how to use a particular chemical or hood should be directed to Steve Jurss. In general, chemical policy will be different for Acid and Solvent hoods. Before using a hood, note where the eyewash, safety shower, and nearest telephone are located.

General Hood Policies

Sign-in and out

All hoods in BNC have a sign-in sheet. These should be filled out when you begin to use the hood, and signed out of when you are finished. These sheets serve to inform users whether a hood is currently in use, who to contact if there is a problem in the hood, and who to notify if there are samples or chemicals in the hood with no user signed in.

Sash position

For hoods with horizontal sashes: always leave the hood sash at the level indicated by the arrow. The only except to this would be setting up equipment, and the sash may only be raised after all wet chemicals have been covered or cleared out of the hood.

For hoods with vertical sashes: Leave one/one and a half panes of hood face open at all times. This will ensure air flow stays in the 80-125 LFM required to maintain adequate containment at the hood face. 

Airflow and Chemical Containment

Fume hoods serve to direct harmful fumes away from both the researcher working at the hood, and the other researchers and equipment in the laboratory. As such, it is critical to maintain this proper airflow when using the hood. Hood vents should not be blocked, with either samples, holders, cleanroom wipes, etc. This includes the vents at the font of the hood; front vents should remain clear at all times. Chemical work should be done 100 mm (4 in) or more from the front of the hood.

Heads may not be placed in the fume hood. The sole exception is moving equipment into/out of a hood after all chemicals have been removed. Contact engineering staff or Steve Jurss if you have an ergonomics issue/need and a work around can be discussed.

Chemical gloves that have contacted any chemicals must not touch items outside of the fume hood, especially other equipment, microscopes, doors, or cell phones. Cell phones must not be placed in fume hoods, or touched with solvent/acid gloves.

The only chemicals that can be used outside of a fume hood are spray bottles of isopropanol for particle cleaning, or wipes pre-wet with isopropanol, acetone, or deionized water. Generally speaking, containers should not be transferred between hoods. If unavoidable, cover the container with aluminum foil to transport in IPA or water only.

Containers should generally not be transferred directly between Acid and Solvent hoods. If this needs to be done, only deionized water may be transferred, and the researcher must be careful that the water, inside of glassware, and outside of glassware are free of any acid/solvent residue.

Cleanliness and Flammable Materials

Excess flammables (solvents, cleanroom wipes) in hoods present a safety hazard, and excess non-flammable presents particle contamination issues and will cause airflow problems. 

Fume hoods must be cleaned/straightened after use, with any chemicals on the hood surface wiped up or rinsed, used cleanroom wipes removed, all aluminum foil removed, any glassware containing chemicals labeled and pushed to the back of the hood, any empty glassware removed, and chemical supply bottles returned to the proper storage cabinet (“Corrosives” for concentrated acids/bases or “Flammable” for solvents/developers). A few (<10) unused cleanroom wipes may be left in one tidy pile, if desired. In solvent hoods, solvent daily use bottles should be topped off above the minimum level.

Secondary Containment

Secondary containment must be used when carrying a chemical container outside of a fume hood zone. If secondary containment is not available in the laboratory for a particular chemical bottle, researchers should ensure the cap is on tight, and carefully use two hands for transport. Please report any containers that do not have suitable available secondary containment to Steve Jurss.

Sharps

Sharps are any materials which may puncture a normal plastic garbage bag, or which may break and then puncture a plastic garbage bag. These include glass pipettes, plastic pipette tips, broken wafer pieces, and broken glass. Sharps must be disposed of in a sharps container.

Wet Chemistry

All wet chemistry must be done inside a fume hood, including using N2 guns to dry samples, and acetone spray for liftoff. Any container of liquids outside a fume hood must be closed. The only exception to this is staff placed isopropanol bottles for particle cleaning.

All chemicals in the lab requires approval from Steve Jurss and an SDS on file.

Particular Dangers: HF/BOE and TMAH. If exposed to either, 911 will need to be contacted.

HF and BOE

Hydrofluoric acid (typically 49%) and Buffered Oxide Etch (equally dangerous due to fluorine buffering) is highly corrosive and highly systemically toxic when concentrated.

Treatment - Decontamination followed by application of 0.13% Benzylkonium Chloride; Additional treatment via 2.5% Calcium Gluconate gel.

If skin contamination occurs, surface pain will occur. Unlike other acids, once rinsed, deep tissue pain will follow.

Treat as soon as possible with 0.13% Benzalkonium Chloride - follow procedure from HF first Aid kit. Then dial 911.

TMAH

Tetramethylammonium hydroxide (TMAH) is highly corrosive and highly systemically toxic when concentrated, especially at 25% concentrations used for development of HSQ and silicon etching. 2.4% TMAH is the basis for metal ion free photoresist developers: MF CD-26(A), MF-319, AZ 326/726/826, etc. The tetramethylammonium ion (TMA⁺) is neurotoxic. The strongly basic/caustic solution liquefies skin and allows the TMA ion to be rapidly absorbed through the skin.

In case of skin contact: Take off contaminated clothing and shoes immediately. Wash off with plenty of water. Take victim immediately to hospital. Consult a physician.

In case of eye contact: Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. Continue rinsing eyes during transport to hospital.

Personal Protective Equipment

Users must ensure they are following all Personal Protective Equipment requirements for the hood type being used, or whenever within the hood hazard zone (marked with the yellow and red striped tape). PPE requirements depend on hood type.

Solvent Hood PPE

1. Base lab PPE: Lab coat/cleanroom suit and nitrile gloves/cleanroom gloves
2. Latex (solvent) gloves
3. Chemical goggles. Note: Impact/safety glasses do not need to be worn under chemical goggles (don't need "double" eyewear).

Solvent gloves should be disposed of after use, and contaminated gloves should not touch items outside of the solvent hood. Gloves can be removed so as to be inside out, and can then be placed on tables/surfaces for short (e.g. 10 minutes) periods of time while doing non-chemical work such as microscope inspection. The gloves can then be turned right-side out and put back on for use in the hood.

Solvent PPE should never be used at or to touch items inside an Acid hood.

Latex gloves are also sometimes used for non-chemical  "clean" work, for example loading samples into a UV system. These non-chemically contaminated gloves may be used to do the loading, but should be removed before touching any door knobs, microscopes, computers, etc.

Acid Hood PPE

1. Base lab PPE: Lab coat/cleanroom suit and nitrile gloves/cleanroom gloves
2. Orange acid gloves
3. Chemical apron/smock
4. Chemical goggles. Note: Impact/safety glasses do not need to be worn under chemical goggles (don't need "double" eyewear).
5. A face shield is also required when pouring from supply bottles, and when working with any amount of concentrated HF/BOE.

Acid gloves are reused, and should be left in the acid glove storage area on top of a plastic wrapper on the stack of gloves of the same size. Case should be taken to rinse acid gloves in deionized water after using them to ensure no acid residue remains. Gloves should be disposed of after use with Piranha solution, due to the change of breakdown. Gloves should be inspected before use, and if found to have any holes or worn areas, should be disposed of in the trash can. Acid gloves should never be used to touch items outside the acid hood (with the exception of glassware which you're taking into/out of the hood), and should not be left outside of the glove storage area for a particular hood.

Care should be taken that acid gloves and acid gown are used right-side out:

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Acid PPE should not be worn while interacting with equipment, microscopes, computers, etc. Acid PPE should never be used to at or to touch items inside a Solvent hood.

Labeling of poured chemicals

All material left in the hood must be labeled with the following information:

• Researcher name - first and last
• Major constituents of solution (Written out - example: hydrochloric acid, not the abbreviation "HCL")
• Date of Pour

If the solution will be intentionally left unattended, it should also be labeled with:

• Date and time of return

If a solvent, the unattended liquid needs to be covered with foil or an evaporating dish. Extended processes may be done for up to 72 hrs, email Steve Jurss if chemicals will be left for longer.

Unlabeled chemicals, samples, or glassware is considered both trash and a safety hazard, and will be disposed of.

Chemical Disposal

Acid Hood Chemical Disposal

BNC has an active acid/base neutralization system which neutralizes the pH of chemicals sent down hood drains, which allows for the disposal of acids and bases down the hood drain. Please make sure materials are poured slowly and with copious amounts of water for dilution. Let any heated solutions cool to about 40 C before pouring down the drain.

High heavy metal containing wastes (ex. spent plating baths) need to be containerized and sent as hazardous waste. Waste chemical containers must be labelled with the standard Purdue waste label. All the materials in the container must be listed by their full name (no abbreviations) and approximate volume.

Solvent Hood Chemical Disposal

Some solvent hoods have drains for disposal of water and basic/caustic commercial photoresist developers (EXCEPTION: developers for SU-8 and PMMA are solvent based). Solvents may not be disposed of down hood drains under any circumstances. If you are unsure of how to dispose of a particular chemical, email Steve Jurss.

Instead of being poured down the hood drain, solvents are placed in white "antifreeze containers" and separated into halogenated (Containing halogens: fluorine, chlorine, bromine, iodine) and non-halogenated (Lacking any halogen) waste. Waste chemical containers must be labelled with the waste label specific to the waste type. Most solvents in the cleanroom are non-halogenated, with the main exception being chlorobenzene.

Funnels are provided in hoods for help pouring into the solvent disposal containers. Upon completion of adding waste to containers, remove the funnel and replace the container cap immediately. Solvent waste bottles must remain capped when not in use, and absolutely must be capped if a user is not present at the hood for any amount of time. Additionally, all the materials in the container must be listed by their full name (no abbreviations) and approximate volume. Exact volume is not important, but chemical content is.

Empty Chemical Bottle Disposal

When using chemicals, empty one bottle fully before opening another. This has a direct effect on safety issues, storage efficiency, and cost.

Empty Acid Bottle Disposal

When an acid or base/caustic bottle is emptied, triple rinse inside and outside three times with deionized water, dry the outside of the bottle, attach a "Safe For Disposal" tag, and place it in the red waste/recycling bin. Also, triple rinse the cap and throw in the trash.

Empty Solvent Bottle Disposal

When a solvent bottle is emptied, (optional: Invert the container on a cleanroom wipe for a few minutes to allow for removal of remaining solvent), use N2 to dry the inside so no liquid remains. Attach a safe for disposal tag and place in the red waste/recycling bin. Also, dry the cap and throw in the trash.

General Laboratory Policy

1. General Policies

   1. No food or drinks in labs, galley, or subfab.

   2. No smoking anywhere in building

   3. Appropriate PPE requirements are in effect at all times.

2. Lab access

   1. Training is required for unescorted access to the labs.

   2. Each lab user must swipe their own entry card for every entry into a lab.

   3. Visitors over the age of 18 are allowed, subject to the following rules: 

      1. Lab visitors must be accompanied by a certified lab user at all times, and may not be left unescorted in the lab for any period of time.

      2. Lab visitors may not handle or use any equipment, chemicals, or hazardous materials.

      3. Lab visitors may not borrow a swipe card or key for lab entry.

      4. The lab visitor's host is responsible for ensuring the visitor follows all lab and general facility safety rules.

3. Lab attire

   1. All personnel entering BNC Laboratories are required to wear:

      1. Fully enclosed shoes

      2. Full leg covering - long pants and skirts

      3. Safety glasses (in labs marked as required)

      4. Working with chemicals and in fume hoods requires additional PPE

4. General Glove Use: 

   1. Gloves are for your protection and the protection of the equipment or process. 

   2. Gloves may not be used to open doors, answer phones, or use cell phones. 

   3. Chemical gloves (either for solvent or acid use) may not be used to touch items outside of the fume hood.

   4. For samples that leave the laboratory, use the "one glove" method to transport samples to another laboratory.

5. Glove types:

   1. General labs

      1. Blue Microflex (nitrile) general use - One glove rule applies for non-chemical/biological use. Single glove (on the non-dominant hand) use for control of contamination to samples/devices outside the lab.

      2. Biological Safety Level 1 - Gray Gloves. Must be removed before leaving the laboratory.

      3. Biological Safety Level 2 - Black Gloves. Must be removed before leaving the laboratory.

6. Ordering and Lab supplies:

   1. All chemical orders must have an up to date SDS attached to the order for approval by BNC Safety Officer Steve Jurss.

   2. All orders must be made using Ariba.

      1. If you need to arrange training in Ariba, please contact the BNC Business Office or Secretarial Staff.

   3. Lab supplies are delivered daily, give at least 24 hours.

      1. Request supplies through Lorraine Fox: foxl@purdue.edu, BRK 2251.

      2. CR stocked in AM, Labs stocked in PM

   4. If you have questions regarding the pre-approved chemical list, please contact Steve Jurss. 

   5. If you have questions related to the ordering process, please contact the BNC Business Office or Secretarial Staff.

7. Ordering chemicals and getting chemicals into Birck

   1. If you major professor is resident at BNC: Attach an electronic copy of the SDSs to the Ariba order

   2. If your major professor is not resident at BNC: Email Steve Jurss a copy of the SDS for approval before ordering the material. 

   3. Chemicals on campus must be shipped via campus mail. Need the following:

      1. Needs to be shipped from the mailroom

      2. Need an SDS in the box

      3. Needs exterior labeled with researcher name, e-mail address, phone number, and laboratory room number to be placed.

   4. Chemicals cannot be shipped to an office in BNC, and chemicals may not be stored for any length of time in grad offices.

8. Gas Cylinders

   1. Gas cylinders must be changed by designated, trained staff personnel. Untrained personnel should not attempt to change a gas cylinder under any circumstances.

      1. Contact staff before weekend runs to verify gas levels.

   2. No hazardous process gases will be placed in a laboratory.

9. Special Hazards

   1. Laser Laboratories

      1. The foremost concern is the danger to one’s eyes and exposed skin. The user must be trained and certified on working the laser and wear the appropriate eyewear protection.

      2. Contact Jerry Shepard for instructions on how to obtain laser safety training

   2. Biological Laboratories

      1. For biological hazards, special training is necessary.

      2. Contact Guy Telesnicki for biological safety training.

   3. X-Ray sources

      1. Contact REM for X-ray safety training. Go to: http://www.purdue.edu/rem for training dates/times.

10. SDS Information 

    1. SDSs are located in yellow binders, located on end of galleys, at the entrance to the subfab, and the cleanroom gowning room. These locations also contain the written RTK compliance manual, and chemical inventory. The RTK DTIs for BNC are Steve Jurss, Tim Miller, Dave Lubelski, and Ron Reger.

       1. SDS manuals contain SDSs by room #

       2. Also available: Chemical Hygiene Plan, Personal Protective Equipment Policy, and Laser Policy

11. Sharps

    1. All sharps (including plastic pipette tips) must be place in a sharps container

    2. Syringes with needles shall not be recapped but placed directly into a sharps container

12. Citizenship Violations

    1. Equipment

       1. The Birck disciplinary committee is comprised of two faculty members, a staff scientist, a student representative, and the engineering manager. 

       2. Policy and safety violations are first discussed between the engineering manager and the violator(s), after which the level of discipline is recommended to the committee, who determines the final disposition of the issue. 

       3. The committee can decide penalties from restricted access to suspension, depending on severity.

    2. Safety and Housekeeping

       1. All users are responsible for cleaning up after themselves and for leaving their work areas ready for use by others.

       2. If any user is observed leaving a mess in a hood or near equipment, or leaving an unattended tote not in its proper storage location, they will be subjected to mandatory participation in 4 hours of weekly staff support duties, or a one-week suspension of all cleanroom privileges. This means denied access to the cleanroom for one week.

Cleanroom Specific Policy

1. The Scifres Nanofabrication Laboratory

   1. The purpose of the cleanroom is to maintain a controlled environment for sensitive research. This includes control of particles, temperature, and humidity. As a result, materials allowed into the cleanroom are heavily restricted based primarily on particle generation. For example, woven cleanroom wipes are used instead of normal paper. These cleanroom wipes are much lower in particles and do not tear. Common activities which generate particles include talking, cell phone use, quick movement, and wafer cleaving. Running and fast walking are prohibited, as these disrupt air flow. Particles are minimized by conforming to ISO Class 3, 4, and 5 standards.

   2. The cleanroom is 25,252 square feet of space. Keeping the level of particle contamination low requires the active consideration of particles by all cleanroom users. Users can minimize the generation of particles within the cleanroom by understanding and following the procedures and protocols developed for the Scifres Nanofabrication Laboratory.

   3. In order to minimize particle contamination (and increase research quality) within the cleanroom, access is limited to those whose work requires entry. 

      1. Each user is required to swipe their own Birck badge for access into the cleanroom (Piggy backing on another user's card is not allowed). 

      2. Visitors are always welcome to view cleanroom operations from the cleanroom tour aisle around the perimeter. 

      3. Visitor entry is only permitted in special circumstances, and requires pre-approval from the Engineering Manager and escort by a BNC staff member.

   4. Due to the extreme danger presented by common semiconductor processing chemicals (particularly HF/BOE and TMAH), chemical use in the cleanroom is heavily regulated.

      1. All open liquids must be kept in a hood. 

      2. No "benchtop" chemistry may be performed under any circumstances, even if the chemicals are not dangerous. 

      3. For protection of other users and themselves, all cleanroom users need to be aware of proper policy, understand the SDSs of the chemicals they are using, and expect other users to do the same.

   5. Supplies for the cleanroom may be obtained from Lorraine Fox (BRK 2251, Available 1-2 PM Monday to Friday). 

      1. Get glassware and tweezers, label your glassware with name and professor (and chemical ONLY if specialized).

      2. Be aware that new glassware is contaminated with oils from manufacturing and particles, and will need to be cleaned once in the cleanroom.  

      3. Glassware that has been used in other labs on campus is not allowed in the cleanroom.

2. Cleanroom training

   1. Prior to the actual face-to-face training session, there are a number of prerequisites you must perform. Tim Miller is the Birck Staff member administering the BNC206 Cleanroom Training, and Bill Rowe administers cleanroom bins and badges. To ensure you have performed the following prerequisites, please send the following pieces of information to miller@purdue.edu and wrowe@purdue.edu:

      1. The name of your major professor
      2. Your Purdue login
      3. The date you recieved BNC 105, 150, and passed the 206 online quiz with an 80% passing score.
   2. After sending this information, you may then register for a BNC 206 Cleanroom Training session.
   3. If a user does not enter the cleanroom for a period of one year, badge access is terminated and retraining is required.
   4. If a user does not use a piece of equipment in the cleanroom for a period of time, access may be revoked and retraining will then be required.  This policy is specific to certain equipment sets.
      
      
3. Safety - Chemical Safety

   1. There are two types of fume hoods in the cleanroom: acid hood (all plastic, has a drain) and solvent hood (stainless steel, usually no drain).

   2. While using hazardous process materials, you must wear the following Personal Protective Equipment (PPE) in addition to your cleanroom gown.
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   3. The PPE must be worn when you are working in the zone designated by the striped tape near the acid and solvent hoods.

   4. There are 20 shower/eyewash stations in the cleanroom.  When you are working in the cleanroom, you should take time to locate the nearest station.  In the event of a chemical exposure, proceed directly to the station and rinse for 15 minutes.

   5. If you have any questions please contact the staff before trying something new.
      
      
4. Safety - Hood protocols
   1. Never use acids and solvents in the same fume hood.
   2. Never dispose of solvents down the drains in the hood.
   3. Never reach with your hands into chemical solutions.
   4. Use good chemical hygiene practices.
   5. Do not work within the first four inches of the hoods, this space is needed for proper airflow.
   6. Acids are disposed of in acid drains.
   7. Solvents are captured for disposal .
   8. Always add acid to solutions! The (apparent) exception to this is Piranha solution, where the hydrogen peroxide should be added to the sulfuric acid.
   9. Work diligently to minimize chemical use. Don't pour 1 L when 100 mL would be sufficient.
   10. Clean your work area before leaving.
   11. Solvent soaked wipes must be dried and disposed of before leaving the cleanroom
   12. Acid soaked wipes should be rinsed with water, wrung out, and thrown away before leaving the cleanroom.
   13. Dry beakers may not be left in the hood. Aside from properly labeled chemicals with a return time, anything left in the hood will be disposed of.

   14. Chemical splash goggles are required for any chemical work in either acid or solvent hoods. Safety/impact goggles do not need to be worn under these.

   15. When using any amount of HF acid (or BHF), a face shield is also required.

   16. When working in the cleanroom, outside of the chemical hoods, impact/safety glasses or prescription eyewear is required at all times (except when sitting working with a microscope).
5. Good cleanroom practices

   1. Working in a cleanroom requires patience and diligence. Users must take precautions to minimize contamination caused by their actions. The following are good practices while in the cleanroom:

      1. Move slowly in the cleanroom. 

      2. Do not restrict the laminar airflow. That is, do not place anything above your sample such as your head, hands, arms, etc. 

      3. Bathe and change your clothes daily. 

      4. Trim long fingernails to avoid puncturing gloves. 

      5. Wear non-linting street clothes of cotton or polyester blend fabrics. 

      6. As a general rule, once an object enters the cleanroom then it stays in the cleanroom. The only exception is samples may be carried in and out in a clean container. 

      7. If you need to change your gloves, please return to the gowning room. 

      8. A buddy is required from 5pm to 8am while you are in the cleanroom regardless of your process. 

      9. Smokers should take a drink of water before entering the cleanroom.

6. Bad cleanroom practices

   1. The following activities generate particles and other contaminants (hurting facility research), and are not allowed in the cleanroom:

      1. Do not run while in the cleanroom. Brisk walking is also not advisable. 

      2. Do not unzip your cleanroom suit while in the cleanroom. 

      3. Do not open the emergency exits unless during an evacuation. 

      4. Do not bring in non-cleanroom compatible materials (paper, pens, pencils, cardboard). 

      5. Food and drink are not allowed in the cleanroom. Chewing gum or sucking mints are not allowed. 

      6. Do not go under the raised floor of the cleanroom. 

      7. Do not prop up your feet on a chair, table, or other raised surface. Feet belong on the floor. 

      8. If you have a cold, it is advisable to not go in the cleanroom.

7. Forbidden items
   1. The following materials and items may not be brought into the cleanroom:

      1. Laptop computers. If a group would like a laptop for work in the cleanroom, a new machine must be purchased and wiped down by BNC staff. This machine must not be removed from the cleanroom.

      2. Paper (other than cleanroom paper). 

      3. Research notebooks (other than issued cleanroom notebooks). 

      4. Cosmetics (make up, eye-liner, lipstick, mascara, cologne, perfume, etc). 

      5. Hairspray, hair gel, and other hair styling products. 

      6. Old glassware used in other facilities. 

      7. Totes and toolboxes.

      8. Wedding rings and jewelry is allowed, but rings with prongs or sharp edges should be avoided.

   2. Note: Cell phones are allowed in the cleanroom, but must be carefully wiped down in the gowning room each and every time prior to entry into the cleanroom.

8. Materials in the cleanroom

   1. Material entry into the cleanroom by a user is limited to samples and labware purchased from the BNC Store Room. 

   2. All samples and labware are to be taken into cleanroom through the gowning room, and must be wiped clean with a cleanroom wipe and 10% isopropanol. 

   3. Personal totes may not enter the cleanroom. 

   4. Notebooks must be cleanroom notebooks issued by the BNC Procurement Officer. Once a notebook is in the cleanroom, it must stay in the cleanroom or gowning room.  A copier is provided in the gowning room with cleanroom paper. 

9. Common situations

   1. Taking printed material in: Bring printed material into the gowning room for copying onto cleanroom paper. Print the material from your office computer to the gowning room printer through the network.

   2. Taking printed materials out: Frequently, users will want to copy their notes from the process they have completed.  The preferred method is to scan the material to a pdf file on the copy/scanner in the gowning room.  The file can be saved on a USB flash drive and printed from your office computer. Cleanroom paper is expensive so please minimize its use. 
10. Storage within the cleanroom:

    1. Upon request, cleanroom users will be assigned a cleanroom storage bin. Your storage bin should be used while conducting cleanroom work, and replaced in the assigned slot whenever you are not in the cleanroom.

    2. Any glassware used in the cleanroom must be must be purchased new from the BNC Store Room. It should be taken by the user through the gowning room, wiped down with 10% isopropanol, and placed in a user's storage bin.  All glassware and process materials must fit within your storage container.

    3. Chemicals may only be brought into the cleanroom by BNC staff.  Please follow all chemical safety guidelines.

11. Cleanroom supplies

    1. Lorraine Fox is able to provide for many of your cleanroom supply needs. You are able to purchase beakers, tweezers, goggles, cleanroom notebooks, and other supplies.

    2. Common supplies are stocked in the cleanroom of chem wipes, glass slides, aluminum foil, etc.  Please help keep the cost down by avoiding excess use.  Please do not use 3 chem wipes when 1 will suffice.

    3. Cleanroom supplies are 5 to 10 times more expensive than general laboratory supplies.

       1. Standard chem wipes are $4.00/box of 100 while cleanroom wipes are $4.00/box of 20. 

       2. Glass slides are $3.20/box of 50 while cleanroom glass slides are $26.00/box of 50. 

       3. Lab coats are $12.00 while a cleanroom suit is $300, and they must be laundered every 5 days! 

    4. BNC Supplied Chemicals 

       1. Check under your hood for cleanroom chemicals.  Do not open more than one bottle of the same chemical at a time. 

       2. If you finish a bottle, follow the posted protocol: triple rinse, tag the empty bottle as clean, discard cap, and place in red bins for disposal. 

       3. If a stock chemical is not currently stored under your hood, transport a new bottle from the supply cabinets near the lithography bays.  (see transport note under safety section)

12. Gowning - General

    1. The purpose of gowning is to keep human borne contamination contained within the cleanroom garment. This is accomplished by overlapping layers of the garment system.  Our garment system starts in the pre-gown area outside the cleanroom with shoe covers, a bouffant cap, followed by face veil, hood, jumpsuit, boots and cleanroom gloves.

    2. Gowns for cleanroom users are orange in color.  Gowns can be worn for one week under normal conditions.  It is the user’s responsibility to place gowns in the laundering bins.  If your gown becomes prematurely or chemically soiled, place it in the laundering bin and select a new one. If your gown is damaged, place it in the repair bin above the printer. 

    3. Gowns may occasionally be patched to repair tears.  If you happen to select a patched gown, please use it.  Users found wearing soiled garments will be subject to sanctions.

13. Gowning - Procedures: There are two procedures once you have entered the gowning room.  The first is for fresh garments, the second for previously worn garments
    

    1. Fresh Garment Gowning

       1. Select a hood, face veil, jumpsuit, and boots of the appropriate size.

       2. Snap the face veil into the hood and pull the hood over your head.  Use care to make sure that all hair remains inside the hair cover while putting the hood on.  Adjust the hood with the snaps in the rear to provide a snug but comfortable fit.  Pressing the wire in the face veil will ensure a snug fit and help prevent fogging. 

       3. Put on the cleanroom jumpsuit without allowing any portion to touch the floor.  The recommended procedure is to gather the arm and leg cuffs at the bottom of the jumpsuit zipper.  Place one leg into the leg of the jumpsuit while releasing the leg from the zipper bottom.  Pull the jumpsuit on that leg such that it completely clears the shoe cover.  Repeat for the second leg. 

       4. Holding the sleeves of the jumpsuit at the bottom of the zipper, arise and pull the waist of the jumpsuit to your waist.  Put one arm into  the jumpsuit while releasing that cuff.  Repeat with the second arm, then pull the upper part of the jumpsuit into place. 

       5. Zip the jumpsuit all the way to the top. 

       6. Put on the cleanroom boots while ensuring that the upper part doesn't touch the floor.  Adjust the fit with the snaps for a snug, comfortable fit. 

       7. Check yourself in the mirror. 

       8. Put on a pair of gloves and safety glasses. 

       9. Enter the second air shower.

    2. Previously Worn Garment
       1. Procedure is the same, except that the garment is taken from your assigned hanger.

    3. Degowning procedure: The degowning procedure is the reverse of the gowning procedure:

       1. Remove safety glasses. 

       2. Remove cleanroom gloves. 

       3. Remove boots wile making sure that the upper part of the boot never touches the cleanroom floor. 

       4. Remove the jumpsuit.  Handle the jumpsuit by the cuffs and collar.  Allow the jumpsuit to hang free and immediately hang it on your assigned hanger. 

       5. Remove the hood and face veil and place it on the hanger. 

       6. Snap the boots to the legs of the jumpsuit. 

       7. Exit the cleanroom.  Please be sure to swipe the card reader in the exit airlock.

14. Chemicals
    1. No chemicals may enter the BNC without prior approval by:
       1. Laboratory and cleanroom staff
       2. BNC Industrial Hygienist (sejurss@purdue.edu)
    2. Order using: http://engineering.purdue.edu/NANO/ChemMgmt
    3. Labeling
       1. All containers must be labeled with chemical name, concentration, date/time

Lab Citizenship

• Be realistic when signing up to reserve equipment in iLab. Don't sign up for any more than two consecutive sessions, and sign up for two only when it is absolutely necessary. If you discover that you can no longer use a session that you have signed up for, delete your reservation before as early as possible so that other researchers may use it. The cost to use equipment in BNC is directly related to usage, with higher usage driving lower per use costs. Preventing others from using equipment is both stifling their research, and increasing costs for everyone. Users who repeatedly "no show" reservations, or delete reservations without giving other users adequate time to prepare to use the equipment, may be subject to disciplinary measures.
• Fill out logbooks completely and legibly. It may be tedious to fill in all the blanks, but the information can speed up troubleshooting and greatly reduce down time.

Best Practices

Best practices differ from policy in that, by not following them, you will not (typically) find yourself subject to disciplinary action. However, failure to heed these will result in dirtier research for you and your fellow researchers. 

Solvent Hoods

Solvent Hood Daily Use Bottles

Daily use solvent bottles are for spraying only, and not as clean as chemicals poured directly from supply bottles. The solvent kept in a daily use bottle breaks down the plastic continuously, and this plastic will be carried onto your sample. For soaks and sonication, pour chemicals from the supply bottles. These are incredibly pure semiconductor grade solvents that will be far cleaner without having been stored in a secondary container, like a daily use bottle.

Daily use bottles shouldn't be removed from a fume hood. If the bottles in a hood doesn't appear to work, check under the lid to see if the white plastic ring is covering the hole in the clear plastic tube. If hole in the clear plastic tube is exposed, use the side of the bottle to push the white ring over the hole. If the hole is not covered, the bottle will not pour properly.

If the bottles in the hood are empty, refill them from a supply bottle.

If the bottle is cracked, dry it and get a new bottle from supply room, disposing of gloves and getting a new set afterwards.

Contaminating Solvents

The solvents NMP and HMDS harden common photoresists, and should not be used in the spinner hoods. These include Remover PG, PRS2000, and HMDS.

Training

1. Get to your equipment training 5 minutes early. Staff do not want to wait on you to gown up / get notebook / find the right area / etc.
2. If you cannot attend a training at the last minute, email the staff member. That is better than not doing anything.
3. Generally speaking, all equipment training occurs at the machine. If in doubt, ask the staff member when you sign up for training.  
4. Ask staff for any and all help. We are here to help you.
5. Come down to the staff office and introduce yourself.  It is nice to make a relationship with you, and that will excel you in your research.
6. If applicable, take notes when you are being trained. However, some time staff may prefer you focus your efforts on paying attention, and referring to the SOP after for any additional questions.
7. Be prepared for your equipment training.  Know what you want the machine to do, or achieve.
8. Request training so that you'll be trained close to when you actually need to use the machine. Getting trained on a machine more than a few weeks before you'll actually use it will leave you unfamiliar with the tool.

Right-to-Know Topics

Current Procedures and Resources

Building Emergency Plan

Code of Conduct

Operating Policy and Procedures

REM Chemical Hygiene Plan

BNC 111 Slides

BNC 202 Slides

BNC 206 Slides

BNC Cleanroom Gowning Checklist