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CrossLab Name: Cleanroom Probe 2 


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Problem Reporting Guide
Problem Reporting Guide
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Issue Date and Description


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iLab Name: 
iLab Kiosk:
FIC: Shared
Owner: Nithin Raghunathan Neil Dilley
Location: Cleanroom- Q Bay 2100- J (J-bay)
Maximum Wafer Size: 4"/100 mm


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Overview

General Description

Probe Station II consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. There is a Kiethley SCS4200

An Everbeing EB-6 high precision probe station is available for DC wafer probing. There is a Tektronix 4200-SCS Semiconductor Parameter Analyzer for both IV and CV measurements

with an embedded PC

to collect the data. Details on the parameter analyzer are available here : https://www.tek.com/keithley-4200a-scs-parameter-analyzer-manual-1 

Features

  • Low profile coaxial-driven style stage (optional large knob precision stage)
  • Back-lash free movement
  • Mounting for 12 micropositioners
  • 4.5” Probe Card Holder compatible
  • Micropositioner Standby Dock
  • Microscope Tilting for E-Z lens switching

Applications

  • Basic IV/CV
  • RF, Single Broadband Probing
  • High Voltage, High Current

Sample Requirements and Preparation

 


Standard Operating Procedure


Questions & Troubleshooting

 

Process Library




References

 EB-6 Data sheet