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Problem Reporting Guide
Problem Reporting Guide
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StatusUPMAINT
Issue Date and Description

 

Estimated Fix Date and Comment 10am  - Cleanroom maintenance next to furnace
Responding Staff
Winter Shutdown from to  
R. Hosler


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e-Log Link - Protemp Horizontal Furnaces
e-Log Link - Protemp Horizontal Furnaces
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Image RemovedProtemp Horizontal Furnace - Tube 06 - Polysilicon Deposition

iLab Name: C - Tube 06 Polysilicon
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)


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Table of Contents
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Overview


General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 06 - Polysilicon

Process Temperatures:

  • Tube 06 - 650°C maximum
Technology Overview 


Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References

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urlhttp://youtube.com/watch?v=6RNKkDN_fUY
 - CVD