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Problem Reporting Guide
Problem Reporting Guide
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Status

DOWNUP

Issue Date and Description

 Extended electrical shutdown necessary for JEOL 2 install

Estimated Fix Date and Comment

 System should be available and calibrated by 5 PM.

Responding StaffJustin Wirth

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iLab Name

JEOL JBX-8100FS E-Beam Writer

iLab Kiosk

BRK Lithography Core

FIC

Shared

Owner

Bill Rowe and Justin Wirth (Email, Chat)

Location

BRK 2100P

Max. Wafer

6"/150 mm

Info Links

SOPInternal/wiki/spaces/BNCWiki/pages/6232164

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Contact Justin Wirth if you are interested in partnering with BNC to evaluate these resists and develop standard processes of broad usefulness to the BNC research community. 

AZ nLOF 2000

AllResist

AR-P 6200 and AR-N 7520 are of particular interest:

FAQ: E-Beam Resists

AR-P 6200:

Nanostructures

Developer Comparison

High Contrast Developer

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