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Problem Reporting Guide
Problem Reporting Guide
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Issue Date and Description


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/wiki/spaces/BNCWiki/pages/6235918


iLab Name: Alpha-Step
iLab Kiosk: BRK Metrology Core
FIC:
Shared
Owner: Rich Harlan
Location: Cleanroom - M Bay
Maximum Wafer Size: 6" / 150 mm


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Overview

General Description

The KLA-Tencor Alpha-Step IQ profiler measures step height, waviness and roughness of a surface.

Specifications

Accommodates up to 150mm (6") substrate and 21mm (0.83") thick. Measurement of vertical features ranging from 100 nm to approximately 0.4 mm. Lateral feature detection is limited by the 5 μm stylus radius.


Sample Requirements and Preparation

There are no real requirements, but keep in mind that flexible substrates may experience slight deformation under the 20 mg of force applied by the stylus tip.


Standard Operating Procedure

Training / Video SOP

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urlhttp://youtube.com/watch?v=bWkDfqs3YaQ

Written SOP

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Alpha-Step IQ Profiler - Standard Operating Procedure
Alpha-Step IQ Profiler - Standard Operating Procedure


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Questions & Troubleshooting

What's the difference between fast scan speeds and slow scan speeds?
Fast scan speeds take less time, but at the cost of horizontal resolution and roughness data. Under extreme circumstances it can also cause the stylus to skip.

What's the difference between scanning left to right and right to left?
While the tool is capable of measuring right to left, it's designed to go left to right. That's the method that wears the least on the machine.