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Issue Date and Description

 System back online . Please do not over tighten sample blocks. 7/25/2024 Down, power outage

Down 6/13/2025 Cryo needs to be sent out for rebuild or replacement

Estimated Fix Date and Comment


 1/30/25 System online.  Stage fixed8/1/2024 high voltage needs to be tested and dry scroll pump swapped


Responding Staff

Dave


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iLab Name

C - PVD E-Beam Evaporator - Glancing Angle Deposition (GLAD)

iLab Kiosk

BRK Evaporation Sputtering Core

FIC

Alexandra Boltasseva

Owner

Dave Lubelski

Location

Cleanroom - L Bay

Max. Wafer

3"-75mm



Current Sources

Au, Ti, Al, Ni

Potential Sources

Au, Ti, Al, Ni



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Overview

General Description

4-Pocket Electron Beam Evaporator

Specifications

Large capacity 25cc crucibles, water cooled stage,

  • Angle Can be Adjusted 180 Degrees.


Technology Overview

 No Organic/Polymers Allowed


Sample Requirements and Preparation



Standard Operating Procedure

Please Note: This instrument is billed per  use  based on a 4 hour block

Example : 1  user only uses the tool  per use.  When you vent the system and unload your sample that concludes your reservation .  

Example: If the usage is 10+ minutes  minutes past the initial 4 hour reservation, you will be billed for 2 uses


Questions & Troubleshooting



Process Library


References