Title: JEOL JBX-8100FS E-Beam Writer  
Owner: Wirth, Justin C
Creator: Wirth, Justin C Feb 09, 2018
Last Changed by: Wirth, Justin C Sept 10, 2024
Tiny Link: (useful for email) https://purdue.atlassian.net/wiki/x/chVf
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Birck Nanotechnology Center Wiki (3)
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Time Editor  
Sept 10, 2024 15:37 Wirth, Justin C View Changes
Jul 30, 2024 16:35 Wirth, Justin C View Changes
May 16, 2024 16:44 Wirth, Justin C View Changes
May 10, 2024 14:01 Wirth, Justin C View Changes
May 07, 2024 16:42 Wirth, Justin C  
Outgoing Links
External Links (37)
    www.allresist.com/wp-content/uploads/sites/2/2016/04/ar_600…
    www.allresist.com/category/faqs-e-beam-resists/
    https://nau.edu/CEFNS/Labs/Electron-Microprobe/GLG-510-Clas…
    https://nano.yale.edu/manuals-documentation
    www.techmfg.com/products/stacis/quietisland
    www.cnfusers.cornell.edu/cnf5_tool.taf?_function=detail&eq_…
    https://purdue.ilabsolutions.com/service_centers/4127/equip…
    https://purdue.ilabsolutions.com/schedules/343241#/schedule…
    www.allresist.com/evaluation-of-various-developers-for-e-be…
    https://nano.yale.edu/book/export/html/213
    www.allresist.com/wp-content/uploads/sites/2/2016/12/homepa…
    https://www.microchemicals.com/products/photoresists/e_beam…
    https://teams.microsoft.com/l/chat/0/0?users=jcwirth@purdue…
    www.cnfusers.cornell.edu/cnf5_tool.taf?_function=detail&eq_…
    www.cnf.cornell.edu/cnf_process_ebl_alignment.html
    www.cnfusers.cornell.edu/doc/ShotPitchAndWriteTimeCalculato…
    https://www.jeol.co.jp/en/applications/detail/1698.html
    www.microscopy.ethz.ch/properties.htm
    https://wiki.itap.purdue.edu/pages/replycomment.action?comm…
    https://sums.gatech.edu/articles/2013
    www.techmfg.com/products/stacis/stacisiii
    https://ebeam.mff.uw.edu/ebeamweb/doc/jobfiles/jobfiles/sch…
    https://nano.yale.edu/software-downloads
    https://ebeam.mff.uw.edu/ebeamweb/ref/calculators/rte/RunTi…
    apps.mnc.umn.edu/archive/ebpgwiki/
    mailto:wrowe@purdue.edu
    lnf-wiki.eecs.umich.edu/wiki/JEOL_JBX-6300FS_Electron_Beam_…
    www.ou.edu/research/electron/bmz5364/calc-kv.html
    https://purdue0.sharepoint.com/:f:/s/EVPRP-Birck-S-BirckSta…
    https://docs.google.com/forms/d/e/1FAIpQLScseloN8sGa4y370ZE…
    iopscience.iop.org/article/10.1143/JJAP.43.3767
    mailto:jcwirth@purdue.edu
    www.allresist.com/csar-62-nanostructures-written-at-100-kv/
    https://purdue.atlassian.net/wiki/download/attachments/6231…
    dx.doi.org/10.1016/j.mee.2016.02.003
    nanolithography.gatech.edu/JEOL_JBX-9300FS_Training.pdf
    https://www.jeolusa.com/RESOURCES/Photomask-Direct-Write-Li…
Birck Nanotechnology Center Wiki (6)     Page: SOP - JEOL JBX-8100FS E-Beam Writer
    Page: JEOL JBX-8100FS - Internal Resources - Detailed Specifications
    Page: Staff - JEOL JBX-8100FS E-Beam Writer
    Page: Problem Reporting Guide
    Page: JEOL JBX-8100FS E-Beam Writer
    Page: eLog - JEOL JBX-8100FS E-Beam Writer