Title: Tutorial on Etching  
Owner: Neil Dilley
Creator: Neil Dilley Oct 16, 2023
Last Changed by: Wirth, Justin C May 17, 2024
Tiny Link: (useful for email) https://purdue.atlassian.net/wiki/x/3FFf
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Birck Nanotechnology Center Wiki (2)
    Page: Etching
    Page: Material and Process Compatibility
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May 17, 2024 14:54 Wirth, Justin C View Changes
May 17, 2024 13:20 Wirth, Justin C View Changes
May 17, 2024 13:18 Wirth, Justin C View Changes
May 17, 2024 12:31 Wirth, Justin C View Changes
May 14, 2024 13:31 Wirth, Justin C  
Outgoing Links
External Links (18)
    https://arxiv.org/ftp/arxiv/papers/1404/1404.0509.pdf
    https://wiki.itap.purdue.edu/download/attachments/69176777/…
    https://hbcp.chemnetbase.com/faces/documents/04_02/04_02_00…
    https://www.cambridge.org/core/journals/mrs-online-proceedi…
    https://wiki.itap.purdue.edu/download/attachments/69176777/…
    https://wiki.itap.purdue.edu/download/attachments/69176777/…
    https://www.researchgate.net/publication/263995544_Dry_Etch…
    https://plasma.oxinst.com/campaigns/materials-processes/al2…
    https://snfexfab.stanford.edu/docs/process/attaching-sample…
    https://iopscience.iop.org/article/10.1088/1361-6595/ac1714
    https://wiki.itap.purdue.edu/download/attachments/69870782/…
    https://wiki.itap.purdue.edu/download/attachments/69176777/…
    https://avs.scitation.org/doi/full/10.1116/1.3086642
    https://plasma.oxinst.com/media-centre/?utm_source=gm&utm_m…
    https://hbcp.chemnetbase.com/documents/04_02/04_02_0001.xht…
    https://wiki.itap.purdue.edu/download/attachments/69176777/…
    https://wiki.itap.purdue.edu/download/attachments/69176777/…
    https://wiki.itap.purdue.edu/download/attachments/69176777/…
Birck Nanotechnology Center Wiki (2)     Page: Tutorial on Etching
    Page: AJA ICP Argon Ion Mill Etcher