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SPI Sputter and Carbon Coaters for SEM

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Created by Joon Hyeong Park, last modified on Jun 23, 2021

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Operation Video from SPI

Maintenance Video from SPI

Changing carbon fiber

Replacement Parts

SPI Supplies: https://www.2spi.com/category/coating-systems-rp/sputter-carbon-coaters/
Needle Valve (Gas Leak Valve at Vacuum Control Base): 11425N-AB or VM31/1
O-rings for Pyrex Chamber: 11458-AB or VM24/1

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