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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff

iLab Furnace Kiosk

Create Furnace Log 


View Furnace Log 

Report a Problem

Protemp Process Data

View MSDS Documents



iLab Name: C - Tube 05 Anneal
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)

*** Forming gas in this tool is 4% H2 and balance Ar instead of the usual N2 ***


Overview


General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 05 - Anneal

Process Temperatures:

  • Tube 05 - 1100°C maximum

Technology Overview 


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References


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