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<font size="6">Asylum MFP-3D-BIO Atomic Force Microscope</font> |
iLab Name: Asylum MFP 3D Bio
iLab Kiosk: BRK Metrology Core
FIC: Arvind Raman
Owner: Arvind Raman
Location: BRK 1081
Maximum Wafer Size:
Overview
General Description
The MFP-3D-BIOTM AFM provides high resolution images and accurate force measurement in both air and liquid. Features include: Advanced optical capabilities: The MFP-3D-BIO AFM is integrated with an inverted optical microscope (Olympus IX71), supporting optical microscopy techniques like phase contrast and fluorescence microscopy.
- Environmental controls: vibration isolation; fluid cell; petri dish holder and heater.
- Lowest noise: 8 pm cantilever deflection noise (typical), 20 pm guaranteed.
- Closed loop sensors on all three axes provides high precision 3D motion.
- iDriveTM technique simplifies imaging in liquid, ideal for imaging living biological samples
- Integrated with confocal microscopy
Specifications
Specifications:
- X&Y axes: 90µm range in closed loop; resolution 0.5 nm limited only by sensor noise. Sensor linearity better than 0.5%.
- Z axis: >15 µm range; resolution 0.25 nm limited only by sensor noise. Sensor linearity better than 0.05%.
- Cantilever deflection measurement: Noise <0.02 nm; typical 0.008 nm. Linearity better than 0.5%. Measures cantilever resonances up to 2 MHz standard.
Technology Overview - Remove if multiple tools use the same technology/process
Description of the science behind the process. Include figures and diagrams if applicable.
Sample Requirements and Preparation
Samples that may be used in the tool, materials that are compatible/incompatible, and the required cleaning before the tool may be used. May include both an "ideal" clean and a minimum required clean. Also include BOE/oxide removal, dehydration, or any recommended post process steps.
Standard Operating Procedure
Standard procedure for tool operation, base off established Birck SOPs.
Questions & Troubleshooting
Question about tool use or process result?
Answer to question.
Process Library
Create process template for tool, allows a user to fill in the details of their process.
References
Manufacturer brocheurs, specifications, papers with relevant info on process, and presentations covering the technology. Confluence lacks a native reference feature, so these are added as links.