<font size="6">Carbon Nanotube PECVD</font>

iLab Name: Carbon Nanotube PECVD
iLab Kiosk:
FIC: Tim Fisher
Owner: Dave Lubelski
Location: BRK 2283
Maximum Wafer Size: 2"/50 mm

Overview

General Description

Seki Techtron Diamond PECVD modified to grow carbon nanotubes.

Specifications

Limited access, see PI.

Technology Overview 

 Description of the science behind the process. Include figures and diagrams if applicable.

Sample Requirements and Preparation

Samples that may be used in the tool, materials that are compatible/incompatible, and the required cleaning before the tool may be used. May include both an "ideal" clean and a minimum required clean. Also include BOE/oxide removal, dehydration, or any recommended post process steps.

Standard Operating Procedure

Standard procedure for tool operation, base off established Birck SOPs.

Questions & Troubleshooting

Question about tool use or process result?
Answer to question.

Process Library

Create process template for tool, allows a user to fill in the details of their process. 

References

Manufacturer brocheurs, specifications, papers with relevant info on process, and presentations covering the technology. Confluence lacks a native reference feature, so these are added as links.