iLab Name: Thermo Scientific Apreo S
iLab Kiosk: Purdue Electron Microscopy Facility
FIC: Rosa Diaz
Owner: Alejandro Ramirez
Location: Cleanroom - N Bay
Maximum Wafer Size: 6"/150 mm

Specifications

Electron optics

• High-resolution field emission SEM column with: 
  • High-stability Schottky field emission gun to provide stable high-resolution analytical currents 
  • Compound final lens: a combined electrostatic, field-free magnetic and immersion magnetic objective lens* 
  • 60° objective lens geometry: allows tilting larger samples 
• Automated heated apertures to ensure cleanliness and touch free aperture changes 
• Through-the-lens differential pumping for low vacuum* reduces beam skirting for the most accurate analysis and highest resolution • Beam deceleration with stage bias from -4000 V to +600 V 
• Continuous beam current control and optimized aperture angle 
• Double stage scanning deflection 
• Easy gun installation and maintenance – auto bake-out, auto start, no mechanical alignments 
• Guaranteed minimal source lifetime: 24 months

Electron Beam Resolution at optimum WD

• 30 kV - 0.8 nm
• 15 kV - 0.7 nm
• 1 kV - 1.0 nm

Electron beam parameter space

• Compound Final lens
• Beam current range: 1 pA to 400 nA 
• Accelerating voltage range: 200 V–30 kV 
• Landing energy range: 20 eV–30 keV 
• Max. Horizontal Field Width: 3.0 mm at 10 mm WD (corresponds to 29x minimum magnification).

Stage and sample

• Type - Eucentric goniometer stage, 5-axes motorized 
• XY - 110 × 110 mm 
• Repeatability - < 3.0 μm (@ 0° tilt) 
• Motorized Z - 65 mm 
• Rotation - n × 360° Tilt -15° / +90° 
• Max. sample height - Clearance 85 mm to eucentric point 
• Max. sample weight - 500 g in any stage position (up to 2 kg at 0° tilt) 
• Max. sample size - 122 mm diameter with full X,Y, rotation (larger samples possible with limited stage travel or rotation)

QUICK GUIDE (Complete Guide in computer desktop)

            i           Vent system (wait ~3 minutes)

           ii           Load sample on Multipurpose Stub holder (MSH)

1. Avoid stubs with dimensions that exceed the MSH area.

          iii          Pump system (wait ~3 minutes)

          iv         Take Nav Cam Picture

                     a.Zero x and y coordinates

                     b.Stage – Take Nav-Cam Photo

           v           Define Mode and Detector

          vi          Watch while moving stage holder up slowly until

 10mm initial Working Distance is reached

1. Use scroll wheel of mouse or move in 10mm

steps the Z-direction of the stage.

         vii         Turn Beam ON

1. Initial Voltage 1-5kV

         viii        Find area of interest. Adjust Magnification, Focus

and Link. Fix Stigmation and Alignments.

          ix          Take Picture

           x           Turn Beam Off

          xi          Vent system (wait 3 minutes)

         xii         Unload sample on Universal Standard Holder (USH).

         xiii        Pump system (wait 3 minutes)

If needed, open User Guide (Help Tab) or read Apreo Manual