This document covers the set-up and safe use of the Keyence VK-X3000 Series.  This machine is a non-contact, 3-dimensional, optical laser confocal that uses both white light interferometry and laser hardware. It can be used to profile reflective surfaces and thick semitransparent films on a reflective surface. This system does not have the Film Thickness Measurement option.

1.    SAFETY REQUIREMENTS

1.1.          Eye protection is required while in the cleanroom, except when using a microscope or when wearing protective goggles.

1.2.          Operate the Keyence VK-X3100 with all protective shields and doors in place. Do not place hands or other objects near the sample stage
assembly, hand/fingers may get pinched during sample stage movement.

2.    EQUIPMENT

2.1 Keyence VK-X3100

2.1.1.          5X Objective

2.1.2.          10X Objective

2.1.3.          20X Objective

2.1.4.          50X Objective

2.1.5 150X Objective

2.2 Jigtec Isolation Table

2.3 Jigtec Tilt Stage

3.    TOOL CONFIGURATION 

Caption	Figure

Caption	Figure
Figure 1	Open
Figure 2	Open
Figure 3	Open

4.    CYCLE OF OPERATION

4.1.  Users must have a scheduled time through iLab prior to using the system. Enable the system in iLab.

4.2.  If the system power is not on, refer to section 6 of this document.

4.3.      Launch “VK-X3000 Viewer Application” on Windows desktop.

4.4.  Software will ask if you want to set the XY stage origin. Click “Yes” and the system will home the stage.

4.5.      Once the software is fully open, click on the 5X Objective at the top right of the screen to start with the 5X Objective.

4.6.       Raise the microscope assembly (relative to the stage) using the large manual focus knob above the microscope system to make adequate room . for the sample.

4.7.        Place the sample on the center of the stage. Move the stage by holding down the left mouse on the screen and move the live image (click-dragging) as needed. Alternatively, place the cursor in the area of interest and left double click the mouse to move to the center of the window.

4.8.        Select the “Camera” button before choosing the type of lighting and adjusting the brightness slider.

4.9.        Rotate the manual focus knob above the microscope system to adjust the coarse focus for the sample on the stage.

4.10.       Click the red “AF” to perform a final Auto Focus on your sample.

4.11.       For the 5x and 10x objectives you can change the lighting under Observation Settings between Coaxial, Ring, Coaxial + Ring.

4.12.      Adjust the focus with the desirable lens magnification by repeating steps 4.9 & 4.10. The highest magnification lens should be used for high-resolution height measurements.

4.12.1.      When using the objective lens dedicated to the white light interference, adjust the focus with the standard lens before switching to the lens dedicated to the white light interference.

4.13.       Adjust the brightness of the lighting using the “Brightness” slide bar nest to the Camera button.

4.14.       Select the “Lighting” box to select the desired lighting from the dropdown box (Coaxial or OFF for 20X or higher).

4.15.       Move the XY stage to the position the center of the image of interest and then click “Register Navigation Image” under the Navigation Window to get a stitched together navigation view of your sample. It is best to do this step at low magnification. Click “Finish” if you want to end this early.

4.16.       Double click in the Navigation Window to go to a particular area on your sample for measurement.

Performing Automatic Measurement
4.17.        Verify the optical image is in focus. If not, adjust the focusing handle until the image is in focus before initiating the Autofocus.

4.18.        Select the “Auto” in the “Shape Measurement” window.

4.19.        Click “Start Measurement”

4.20.        After the system has finished “Processing” the data, click the “Save Measurement Results” to save the file into the “Researcher Data” folder. Create a personal folder within the Researcher Data folder by right clicking and selecting “New” and “Folder.

4.21.          Click on the “Analyze” button in the lower right corner to start the VK Analysis software.

4.22.          Follow the steps listed in the “Operation Guide” window.

4.23.          Position the orange cross over the areas of interest.

4.24.          Adjust the image before pressing the “OK” button.

4.25.          Select the next step (Analyze data) in the “Operation Guide”.

4.26.       Select the type of analysis such as “Profile”.

4.27.       Select the appropriate Profile tool.

4.28.       Save the data results to your folder.

4.29.       Select the “X” in the upper right corner to close the analysis software window.

4.30.       Change the objective lens to 5X and move the stage out to remove the sample.

4.31.       Close the Measurement software window and logout of iLab.

 Performing Automatic Measurement Using White Light Interference

This section will be completed after the system has been updated.

5.    SUPPLEMENTAL DATA

5.1. Objective Working Distance

5.1.1.          10X:  NA = 0.30, WD = 16.5 mm

5.1.2.         20X:  NA = 0.46, WD = 3.1 mm

5.1.3.         50X:  NA = 0.80, WD = 0.5 mm

5.1.4.         150X:  NA = 0.95, WD = 0.35 mm

6.    STARTUP and SHUTDOWN

6.1. Startup

6.1.1.  Verify both computer power switches are in the “I” (on) position.

6.1.2. Power on the measurement system using the power button located on the right side of the system. The blue light on the front should flash a few . times and then stay on

6.1.3.  Enable the tool through iLab                                                               

 6.2. Shutdown

6.2.1.    Set the objective to 5X.

6.2.2.    Close all the windows in the software using the “X” in the upper right corner.

6.2.3.     Finish your iLab session and log out