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Overview

General Description

The J.A. Woollam IR-VASE Mark II is a Fourier-transform infrared (FTIR) spectroscopic ellipsometer used to measure the infrared optical constants (n and k), film thickness, and layer structure of thin films and multilayer stacks.

Specifications

Spectral range: 1.7–30 µm (approximately 5900–333 cm⁻¹), spanning near- to far-IR. User-selectable spectral resolution is typically 1–64 cm⁻¹ (higher resolution generally increases acquisition time).

Angle of incidence (AOI): variable angle, typically ~32° to 90° (standard configuration), enabling improved parameter extraction for films and multilayers by collecting data at multiple AOIs.

Measurement time (typical): ~1–30 minutes per angle (commonly quoted for 16 cm⁻¹ resolution); total time scales with the number of angles, resolution, and signal level.

Materials and sample types: Suitable for dielectrics, semiconductors, polymers, oxides, and metals, including thin films, multilayers, and bulk substrates. Measurements are self-referencing (no baseline/reference sample required) and typically performed at ambient conditions without vacuum.

Common limitations / considerations: Results are model-dependent and require appropriate optical models and layer assumptions; highly rough, strongly scattering, or laterally non-uniform samples may reduce accuracy. Practical constraints can also include sample size vs. beam footprint, surface cleanliness, and ensuring the region probed is representative of the sample (especially for patterned or heterogeneous surfaces).

Technology Overview

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Standard Operating Procedure

Standard procedure for tool operation, base off established Birck SOPs.

Process Control Information

Process Control Context

Process Control Charts

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Process Library

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References

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