Thermal

Overview

Various thermal processing equipment is available for oxidation, chemical vapor deposition, and annealing. The Protemp furnaces are horizontal quartz tubes that can process many wafers at once in many configurations. Protemp processes include wet and dry oxidation, CVD nitride and oxide, forming gas annealing, and polysilicon. Rapid and traditional thermal annealing is provided by the Jipelec and Blue M furnaces.

Staff contact: Ron Reger

• Jipelec RTA
• Blue M Furnace
• Protemp Horizontal Furnaces
  • Tube 01 Clean Ox
  • Tube 02 Nitride Dep
  • Tube 03 LTO Dep
  • Tube 04 Field Ox
  • Tube 05 Anneal
  • Tube 06 Polysilicon
  • Protemp Furnace Process Data
• Nitric Oxide Anneal
• H2S CVD Furnace