Thermal
Overview
Various thermal processing equipment is available for oxidation, chemical vapor deposition, and annealing. The Protemp furnaces are horizontal quartz tubes that can process many wafers at once in many configurations. Protemp processes include wet and dry oxidation, CVD nitride and oxide, forming gas annealing, and polysilicon. Rapid and traditional thermal annealing is provided by the Jipelec and Blue M furnaces.
Staff contact: Ron Reger