Thermal

Overview

Open	Open	Open

Open	Open	Open

Various thermal processing equipment is available for oxidation, chemical vapor deposition, and annealing. The Exper-tech furnaces are horizontal quartz tubes that can process many wafers at once in many configurations. Exper-tech processes include wet and dry oxidation, CVD nitride and oxide, forming gas annealing, and polysilicon. Rapid and traditional thermal annealing is provided by the Jipelec and Blue M furnaces.