Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff

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Protemp Horizontal Furnace - Tube 09 - TEOS Deposition

iLab Name: C - Tube 09 TEOS
iLab Kiosk: BRK Furnace Core
FIC: Dallas Morisette
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 4"/100 mm

Overview

General Description

Horizontal furnaces for a variety of processes.

Maintenance:

8/25/23 - cleaned all quartz, rebuilt tube with new orings. changed out old TEOS 300mL for new TEOS 500mL.