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MMR H-50 Hall Effect Station

MMR H-50 Hall Effect Station

Jan 14, 2020

Status

INACTIVE

Issue Date and Description

 

Estimated Fix Date and Comment

 

Responding Staff

 

iLab Name: Hall Effect MMR
iLab Kiosk: BRK Characterization Core
FIC: Tim Sands
Owner: Nithin Raghunathan
Location: BRK 1217
Maximum Wafer Size: 

Overview

General Description

Hall effect system for measuring resistivity, mobility, carrier concentration and dopant type of a wide range of samples using the Van der Pauw method.

Specifications

  • Sample size 14mm x 10mm maximum

  • Temperature range 80K-400K

  • Magnetic field 3300G maximum

System components:

  • H-50 Hall, Van der Pauw controller

  • MPS-50 programmable power supply

  • K-20 temperature controller

Technology Overview - Remove if multiple tools use the same technology/process

 

 

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library


References