MMR H-50 Hall Effect Station

Owned by Wirth, Justin C
Last updated: Jan 14, 2020 by Neil Dilley
1 min read


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusINACTIVE
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: Hall Effect MMR
iLab Kiosk: BRK Characterization Core
FIC: Tim Sands
Owner: Nithin Raghunathan
Location: BRK 1217
Maximum Wafer Size: 

Overview

General Description

Hall effect system for measuring resistivity, mobility, carrier concentration and dopant type of a wide range of samples using the Van der Pauw method.

Specifications

  • Sample size 14mm x 10mm maximum
  • Temperature range 80K-400K
  • Magnetic field 3300G maximum

System components:

  • H-50 Hall, Van der Pauw controller
  • MPS-50 programmable power supply
  • K-20 temperature controller

Technology Overview - Remove if multiple tools use the same technology/process

 

 

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library

References