Issue Date and Description	7/25/2024 Down, power outage
Estimated Fix Date and Comment	8/1/2024 high voltage needs to be tested and dry scroll pump swapped
Responding Staff	Dave

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iLab Name	C - PVD E-Beam Evaporator - Glancing Angle Deposition (GLAD)
iLab Kiosk	BRK Evaporation Sputtering Core
FIC	Alexandra Boltasseva
Owner	Dave Lubelski
Location	Cleanroom - L Bay
Max. Wafer	3"-75mm

Current Sources	Au, Ti, Al, Ni
Potential Sources	Au, Ti, Al, Ni

Overview

General Description

4-Pocket Electron Beam Evaporator

Large capacity 25cc crucibles, water cooled stage,

_{No Organic/Polymers Allowed}

Please Note: This instrument is billed per use based on a 4 hour block

Example : 1 user only uses the tool per use. When you vent the system and unload your sample that concludes your reservation .

Example: If the usage is 10+ minutes past the initial 4 hour reservation, you will be billed for 2 uses

Process Library

References