2025-05-05 to 2025-05-23: Semi-Annual Facility Preventive Maintenance

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iLab Name: Asylum MFP 3D Bio
iLab Kiosk: BRK Metrology Core
FIC: Arvind Raman
Owner: Arvind Raman
Location: BRK 1081
Maximum Wafer Size:

Overview

General Description

The MFP-3D-BIOTM AFM provides high resolution images and accurate force measurement in both air and liquid. Features include: Advanced optical capabilities: The MFP-3D-BIO AFM is integrated with an inverted optical microscope (Olympus IX71), supporting optical microscopy techniques like phase contrast and fluorescence microscopy.

Environmental controls: vibration isolation; fluid cell; petri dish holder and heater.
Lowest noise: 8 pm cantilever deflection noise (typical), 20 pm guaranteed.
Closed loop sensors on all three axes provides high precision 3D motion.
iDriveTM technique simplifies imaging in liquid, ideal for imaging living biological samples
Integrated with confocal microscopy

Specifications

Specifications:

X&Y axes: 90µm range in closed loop; resolution 0.5 nm limited only by sensor noise. Sensor linearity better than 0.5%.
Z axis: >15 µm range; resolution 0.25 nm limited only by sensor noise. Sensor linearity better than 0.05%.
Cantilever deflection measurement: Noise <0.02 nm; typical 0.008 nm. Linearity better than 0.5%. Measures cantilever resonances up to 2 MHz standard.

Overview

General Description

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References

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