Open

iLab Name: Asylum MFP 3D Bio
iLab Kiosk: BRK Metrology Core
FIC: Arvind Raman
Owner: Arvind Raman
Location: BRK 1081
Maximum Wafer Size: 

Overview

General Description

The MFP-3D-BIOTM AFM provides high resolution images and accurate force measurement in both air and liquid. Features include: Advanced optical capabilities: The MFP-3D-BIO AFM is integrated with an inverted optical microscope (Olympus IX71), supporting optical microscopy techniques like phase contrast and fluorescence microscopy.

• Environmental controls: vibration isolation; fluid cell; petri dish holder and heater.

• Lowest noise: 8 pm cantilever deflection noise (typical), 20 pm guaranteed.

• Closed loop sensors on all three axes provides high precision 3D motion.

• iDriveTM technique simplifies imaging in liquid, ideal for imaging living biological samples

• Integrated with confocal microscopy

Specifications

Specifications:

• X&Y axes: 90µm range in closed loop; resolution 0.5 nm limited only by sensor noise. Sensor linearity better than 0.5%.

• Z axis: >15 µm range; resolution 0.25 nm limited only by sensor noise. Sensor linearity better than 0.05%.

• Cantilever deflection measurement: Noise <0.02 nm; typical 0.008 nm. Linearity better than 0.5%. Measures cantilever resonances up to 2 MHz standard.

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References