Tube 08 Phos Drive
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Protemp Horizontal Furnace - Tube 08 - Phosphorus Drive
iLab Name: C - Tube 08 Pros Drive
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)
Overview
General Description
Horizontal furnaces for a variety of processes.
Specifications
Process Capabilities:
- Tube 08 - Phosphorous Deposition (not yet operational)
Process Temperatures:
- Tube 08 - 1100°C maximum