2025-05-05 to 2025-05-23: Semi-Annual Facility Preventive Maintenance

Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
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Status	UP
Issue Date and Description
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iLab Name: C - Nikon Eclipse L150 Microscope 1 (N Bay) & C - Nikon Eclipse L150 Microscope 2 (N Bay)
iLab Kiosk: BRK Metrology Core
FIC: Shared
Owner: Bill Rowe
Location: Cleanroom Bay N
Maximum Wafer Size:

Overview

General Description

The Nikon Eclipse L150 Industrial Microscope can be used for sample inspection in reflection mode. Image capture is obtained through a CCD camera.

Specifications

Reflection Mode Light Source: 100 Watt halogen
Available observations:
- Reflected light brightfield
- Reflected light darkfield
- Reflected light Nomarski DIC
- Reflected light simplified polarized light
Objectives: 5X, 10X, 20X, 50X
Stage Travel: 105 x 100 x 52 mm

Tool Overview

Nomenclature / Identification

Controls

Eye Piece

Interpupillary distance adjustment
1. While looking through the eyepieces with a sample in focus, adjust for binocular vision until the left and right fields of view coincide completely. You should see one clear image when properly adjusted, out of adjustment and you will see double images.
Diopter Adjustment
1. Turn the diopter adjustment rings on both eyepieces to align their engraved lines with the edge of the outer tub of the eyepiece. This is the standard position.
2. Focus on the sample with the 10X objective using bright-field.
3. Bring the 50X objective into the optical path and focus on the sample by turning the coarse/fine focus knobs.
4. Bring the 5x or 10x objective into the optical path and focus on the sample by turning the diopter ring on the right eyepiece (not the coarse/fine adjustment knobs).
5. Now looking through the left eyepiece with your left eye, focus the sample by turing the left diopter adjustment ring.
6. Repeat for all objectives, making small adjustments to the diopter rings until the image stays in focus using any objective.

BF/DF Light Path Selection

Slide the mirror selector lever (1) toward the indication of the mirror for the desired observation method.
1. BF: Push for brightfield observation
2. DF: Pull for darkfield observation

Be sure to slide the mirror selector lever until it contacts the stopper position.

Filters

There are two filter sliders (1) at the end of the illuminator. Two filters can be set on each filter slider. The desired filters can be brought into the optical path by sliding the filter sliders in and out.

Usable Filters	Applications
NCB11 (neutral color balancing filter)	Color balance adjustment for general use and color photomicrography.
ND4 (transmission rate 25%)	Brightness adjustment
ND16 (transmission rate 6%)	Brightness adjustment
GIF (Green interference filter)	Contrast adjustment
IF	For interference

Intensity Ratio Selector

Push or pull the intensity ratio selector (1) to select the desired light path.

Light Path Selector	Symbol	Intensity Ratio
Pushed in		100% for binocular eyepieces
Middle position		20% for binocular eyepieces, 80% for TV/photography
Pulled out		100% for TV/photography

Field Iris

The field iris is used to restrict the diameter of the beam of light entering the objective and thus excludes stray light from the observation path improving image contrast. The diameter of the field iris should be adjusted for each objective power to the extent that is just circumscribes the field of view.

The field iris diaphragm slider (1) and the field iris centering screw (2) are used to adjust the field iris size and position in relation to the observation path.

Aperture Iris

The aperture iris diaphragm determines the numerical aperture of the illumination system. Matching the numerical aperture of the illumination system with that of the objective provides better image resolution and contrast, and also increases the depth of focus.

The aperture iris diaphragm slider (1) is used to adjust the aperture iris size in relation to the observation path. Typically adjusted to 7-80% of the objective's exit pupil.

Revolving Nosepiece

The revolving nosepiece allows the user to easily swap objective lenses into the observation path. Grasp the knurled ring and rotate the nosepiece clockwise or counterclockwise until you feel the detent snap into position.

If the objective is not located at a detent with objective installed, then the observation path will be blocked and the user will only see black.

Do not attempt to rotate the nosepiece by grasping the object lense assembly directly. This can damage the objective lense.

Illumination Controls

Light Intensity Adjustment knob (1).

Focus Knob

Coarse adjustment knob
1. The larger knob is course stage adjustment and is used to quickly move the stage up and down for sample focusing.
Fine adjustment knob
1. The small knob farthest from the microscope base is the fine adjustment knob, and is used to move the stage vertically in small increments to facilitate fine focus of the sample.
Coarse adjustment knob tension adjustment.
1. Typically, the coarse adjustment knob tension is preadjusted for easy use.
2. If adjusted, turning in the direction of the arrow will increase tension and vise versa.
3. If the stage drops by itself when the knob is released, or the microscope quickly loses focus after adjustment the tension is set too low, rotate the ring in the direction of the arrow to correct.

Coarse Focus Stopper

The coarse focus stopper restricts the movement of the coarse focus knob so the stage cannot be raised beyond the operators specified limit.

With the sample in focus, turn the coarse focus stopper ring as far as it will go in the direction of the arrow on the base of the microscope (about 3/4 revolution). The coarse focus stopper is now clamped in position. When changing the sample, lower the stage by turning only the coarse focus knob. After changing the sample, gently raise the stage by turning only the coarse focus knob as far as it will go. The sample should be roughly in focus when the stage has been raised as far as it will go. Use the fine focus knob to bring the sample into perfect focus.

Standard Operating Procedure

General Observation Procedure for Bright-field Reflected Mode Microscopy
Press the main switch (1) to "I" (ON).
Configure the microscope for Bright-field microscopy Push the intensity ratio selector in to 100% binocular. Push in the Bright-field selector. Rotate the nosepiece to use the 10x objective. Lower the stage as far as it will go. Set the desired brightness of the illumination. Raise the levers to fully open the field diaphragm and the aperture diaphragm. Push in the NCB11 filter to compensate for color temperature. Install the ND filter to adjust the brightness.
Place sample on the microscope stage, and bring it into focus while looking through the binocular eyepieces.
Adjust the diopter. link to instructions above
Adjust the interpupillary distance. link to instructions above
Change the magnification and observe the sample. Select the desired magnification. Finely adjust the focus. Adjust the brightness. Adjust the field diaphragm to circumscribe the view field. Adjust the aperture diaphragm to 70-80% of the objective's Numerical Aperture. Adjust the brightness using the ND filter. Tip: When observing a sample with small contrast, such as the mirror-faced sample, it can be rather difficult to focus on it. In such a case, stop down the field diaphragm so that its image can be seen in the eyepieces. Now attempt to focus on the rim of the diaphragm image. When the rim is in focus, the sample will also be in focus.
Dark-field Microscopy
Focus on the sample using bright-field microscopy techniques discussed above.
Configure the microscope for dark-field microscopy. Pull out the bright-field / dark-field slider. Adjust brightness. Adjust ND filters. Note: The field and aperture diaphragms are fully-opened automatically. However, the lever positions do not change. Return the microscope to bright-field microscopy Push in the bright-field / dark-field slider. Adjust Brightness. Adjust ND filters. Note: The field and aperture diaphragms automatically return to the status before the microscope was set to dark-field microscopy.
Photomicrography
This microscope is equipped with a photomicrography tube and camera for observation and photography using the attached PC.

Frequently Asked Questions

Question 1?
1. Answer 1.

References

Nikon Eclipse L150 Manual

Nikon Eclipse L150 L150A ME600L Brochure (accessory and option info)

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