Overview

General Description

The Leica DM3000 has a large motorized stage for up to 200mm wafers but will also accept small samples. The lenses are also motorized. It has a 5x, 10x, 20x, 50x and 100x objective lenses.

Specifications

The Leica DM8000 will do magnifications from 50x to 1,000x. The stage will accept small samples and up to 200mm wafers.

Technology Overview - Remove if multiple tools use the same technology/process

 Description of the science behind the process. Include figures and diagrams if applicable.

Sample Requirements and Preparation

Samples that may be used in the tool, materials that are compatible/incompatible, and the required cleaning before the tool may be used. May include both an "ideal" clean and a minimum required clean. Also include BOE/oxide removal, dehydration, or any recommended post process steps.

Standard Operating Procedure

Standard procedure for tool operation, base off established Birck SOPs.

Process Control Information

Process Control Context

Process Control Charts

Questions & Troubleshooting

Question about tool use or process result?
Answer to question.

Process Library

Create process template for tool, allows a user to fill in the details of their process. 

References

Manufacturer brochures, specifications, papers with relevant info on process, and presentations covering the technology. Confluence lacks a native reference feature, so these are added as links.