Open

Overview

General Description

This is a digital microscope (Keyence VHX-7000 Digital Microscope) capable of imaging up to 6,000x. Part of the system (Keyence EA-300 Elemental Analyzer) is an elemental analysis system. The elemental analysis system can detect material makeup of substrates and crucibles.

Specifications

Keyence VHX-7000 Digital Microscope
Key Features-
Motorized 8 inch stage
Motorized nosepiece (lenses)
4K resolution
Multi-angle observation
Auto focus
2D and 3D profiling
Up to 6,000X magnification

Keyence EA-300 Elemental Analyzer
Key Features-
The Elemental Analysis (EA) portion uses Laser-Induced Breakdown Spectroscopy (LIBS) technology to determine the elemental composition of your sample
It uses a laser which will strike your sample and evaporate the material turning it into plasmas.
It will analyze the plasma and let you know the composition of your sample in 2 seconds
EA can detect 75% of the elements in the periodic table of elements

Sample Requirements and Preparation

Samples that may be used in the tool, materials that are compatible/incompatible, and the required cleaning before the tool may be used. May include both an "ideal" clean and a minimum required clean. Also include BOE/oxide removal, dehydration, or any recommended post process steps.

Standard Operating Procedure

Standard procedure for tool operation, base off established Birck SOPs.

Process Control Information

Process Control Context

Process Control Charts

Questions & Troubleshooting

Question about tool use or process result?
Answer to question.

Process Library

Create process template for tool, allows a user to fill in the details of their process. 

References

Manufacturer brochures, specifications, papers with relevant info on process, and presentations covering the technology. Confluence lacks a native reference feature, so these are added as links.