Nitric Oxide Anneal

Owned by Wirth, Justin C
Last updated: Sept 03, 2024 by Hosler, Richard S
1 min read


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status

UP

Issue Date and Description


Estimated Fix Date and Comment


Responding Staff


Nitric Oxide Anneal

DO NOT LEAVE TUBE UNATTENDED WHEN Nitric Oxide GAS IS BEING DISPENSED. 

For long anneals either plan for an interval break or have someone else trained on the tube take over. If no-one is present at the tube, it should NOT be dispensing NO gas!

Limited Use

Due to cleanliness and contamination concerns, this furnace tube is limited to authorized users. Please contact Rich Hosler for more info.

iLab Name: Nitric Oxide Anneal

iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - Q Bay
Maximum Wafer Size: 3"/75 mm

This tube is currently configured for Prof. Chen's group as of 9/3/2024. 

Overview


General Description

Small bore, high temperature furnace for annealing silicon carbide.

Specifications

  • Max Temperature (°C): 1150°C

  • Max Processing Time (min): n/a

  • Available Gas: Nitric Oxide, and Argon

  • Vacuum Capability: None

  • Max Wafer Size: 3"/75 mm


Sample Requirements and Preparation

If possible, samples should be Piranha cleaned for 10 minutes. If this is not possible due to material incompatibility, a TAI Solvent clean followed by a mandatory DI water rinse step is permissible.


Standard Operating Procedure

Nitric Oxide Anneal Standard Operating Procedure

 

References

Nitric Oxide MSDS