Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	UP
Issue Date and Description
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Responding Staff

iLab Furnace Kiosk

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Protemp Process Data

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iLab Name: C - Tube 01 Clean Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm

Overview

General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

Tube 01 - Wet / Dry Oxidation (Super-Clean Si users only)

Process Temperatures:

Tube 01 - 1100°C maximum

All furnace tubes are capable of samples up to 6 inches in diameter.

Technology Overview

Sample Requirements and Preparation

Standard Operating Procedure

- Thermal Oxidation

Questions & Troubleshooting