iLab Name: Leica Confocal
iLab Kiosk: BRK Characterization Core
FIC: Shared
Owner: Sean Rinehart
Location: Cleanroom - J Bay
Maximum Wafer Size:
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Overview
General Description
Specifications
Technology Overview - Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References