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iLab Name: T64000 Raman
iLab CoreKiosk:
 BRK Metrology Core
FIC: Vladimir Shalaev
Owner: Alexei Lagoutchev
Location:
BRK 1273
Maximum Wafer Size: 


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Overview

General Description

Microscope-coupled triple monochromator with first two stages in double-subtractive configuration and LN2 cooled CCD detector

Specifications

Raman spectroscopy with exceptionally low (5cm-1) frequency reach, excitation wavelengths across visible spectrum

Technology Overview - Remove if multiple tools use the same technology/process

 

 

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library


References