Location: Cleanroom GH Chase
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Overview
General Description
Ozone generator supplying ozone to the Fiji ALD and Black Magic Systems, located in GH Chase of the cleanroom.
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Specifications
Range: 0-5000 sccm
Standard Operating Procedure
Starting the Ozone delivery system
Unless the ozone delivery system is currently being used, you will find the system is not operating and gases are not flowing. Identified by the following initial state of the tool.
Sci-Turbo L
MFC RD Screen shows 0 on all values
Generator
Display shows 0 % power
Knob should be turned all the way CCW until it stops.
Ozone Switch is in the off position
Toggle switch is at Local and indicated by the green light
Red light indicating Ext. Interlock conditions not met
Press the D button to advance the menu to "MFC N Parameters"
Press the circle button to advance to "MFC A Parameters"
Press E to access the menu
Set to 5 VDC
Red Ext. Interlock light should shut off
Verify flow by advancing to MFC RD Screen
Flip Ozone Switch to On position
Rotate Knob CW to increase the power
Set dosage rate