Fabrication
Fabrication Equipment is used for top-down nanofabrication on a variety of substrates. Included in this category is equipment used to deposit a wide variety of materials, image those materials as well as substrates, oxidize and diffuse materials, provide back-end processing, and synthesize nanoparticles using wet-chemical methods.
For new visitors, Overview of capabilities are described at the top of each topic landing page.
Thermal
Patterning
- Photomask Fabrication
- Spin Coating
- Photoresist Baking
- Optical Lithography
- Electron Beam Lithography
- Other Patterning
- Test patterns
Etching
- ICP RIE
- CCP RIE
- AJA ICP Argon Ion Mill Etcher
- Xactix E1 Xenon Difluoride (XeF2) Etcher
- Tousimis Automegasamdri 915B Critical Point Dryer
- Wet Etching
- Tutorial on Etching
Deposition
- Atomic Layer Deposition (ALD)
- PECVD (Plasma Enhanced Chemical Vapor Deposition)
- CVD
- Evaporation
- Sputtering
- Other
- Electrodeposition
- Materials in Vacuum
Bio-fabrication
Roll-to-Roll
- Maxwell Roll to Roll System
- Fuji Dimatix Inkjet Printer
- Particle Processing Tools
- Nordson Quantum Q-6800 Fluid Dispensing System
- MiLabTech Extrusion Cast Film Line
- Micro Printing Systems TF-100 Screen Printer
- LasX Roll to Roll Laser Cutter/Sinterer
- Kinzel Roll to Roll Screen Printer
Back-end
Processing
- Cleaning
- Solvents
- Photoresist Adhesion Promotion
- Photoresists
- Development
- Lift off and metal adhesion
- Photoresist Removal
- Tweezers
- Cleanroom Supplied Chemicals