Location: Cleanroom GH Chase
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Overview
General Description
Ozone generator supplying ozone to the Fiji ALD and Black Magic Systems, located in GH Chase of the cleanroom, consists of two main components.
- a ODS-9000 Series high-purity ozone generator - The ozone generator contains ozone generating equipment and controls including an oxygen and nitrogen MFCs, an in-line ozone concentration sensor (gFFOZ).
- a SCI-TURBO-L controller - The SCI-TURBO-L controller connects to the ozone generator and controls the flowrate of each process gas, ensures safety interlocks are met, and displays ozone concentrations.
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This is an example of a tip |
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Use of controls, adjustments, or procedures other than those specified in this manual without consulting a competent safety professional may result in exposure to potential hazards. |
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Ozone (O3) is a toxic gas. High concentrations of ozone are dangerous and harmful to humans. Take reasonable steps to avoid exposure. The current maximum 8-hour exposure limit for ozone is 0.1 PPM (according to U.S. OSHA). Concentrations above 0.1 ppm can cause headaches, eye irritation, respiratory problems, dizziness, and nausea. At much higher concentrations it can cause death. |
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Non-flammable materials may become flammable in the presence of high oxygen and/or ozone concentrations! |
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The ozone monitor contains an ultraviolet (UV) lamp. Never remove the lamp from its housing while the unit is powered on. Eye exposure to UV light is extremely dangerous. |
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High voltages are used in the process of generating ozone, however all circuits of the generator are either covered or isolated. |
Specifications
Oxygen Flow: 0.25 to 5 slpm
Ozone Outlet Pressure: Internally set to 30 PSIG
Ozone Outlet Flow Range: 0-5000 sccm
Standard Operating Procedure
Starting the Ozone delivery system
Unless the ozone delivery system is currently being used, you will find the system is not operating and gases are not flowing. Identified by the following initial state of the tool.
Sci-Turbo L Controller Display
MFC RD Screen shows 0 on all values
Generator
Display shows 0 % power
Knob should be turned all the way CCW until it stops.
Ozone Switch is in the off position
Toggle switch is at Local and indicated by the green light
Red light indicating Ext. Interlock conditions not met
Press the D button to advance the menu to "MFC Parameters"
Press the E button to access "MFC N Parameters"
Press the circle Circle button to advance to access "MFC A Parameters"
Press E to access the menuSet to 5 VDCthe setting
Press the left arrow 3 times to activate the first whole number (0.00 VDC)
Press the up arrow until 5 is displayed (5.00 VDC)
Press the E button to input 5.00 VDC as the set point
Red Ext. Interlock light should shut off and green standby light will come on.
Verify flow by advancing to MFC RD Screen
Flip Ozone Switch to On position
Rotate Knob CW to increase the power
Set dosage rate