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iLab Name: AJA Ion Mill
iLab Kiosk: https://purdue.ilabsolutions.com/service_centers/4141/equipment_kiosk/equipment?equipment_id=18964 BRK Etch Core
FIC: Sunil Bhave
Owner: Sean Rinehart
Location: Cleanroom - Q Bay
Maximum Wafer Size: 6"

Overview

General Description

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is an example of a tip WarningThis is an example of a tool warning

system is used for direct milling of thin films.

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References