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Wirth, Justin C

Wirth, Justin C

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  1. Panasonic E620 Etcher
  2. STS AOE

  3. STS ASE 2

  4. AJA Ion Mill


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References:

View file
namePlasma_RIE_Etching_Fundamentals_and_Applications.pdf
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References:

"Plasmas and Plasma-Surface Interactions," Paul May, University of Bristol.