iLab Name: AJA Ion Mill
iLab Kiosk: BRK Etch Core
FIC: Sunil Bhave
Owner: Sean Rinehart Neil Dilley
Location: Cleanroom - Q Bay
Maximum Wafer Size: 6"
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Overview
General Description
This system is used for direct milling of thin films.
Specifications
Technology Overview - Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library