| Page Properties | |||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| |||||||||||||||||
Equipment Status:Set as UP, PROBLEM, or DOWN. See Problem Reporting Guide for more info.
|
iLab Name: Olympus Microscope
iLab Kiosk: BRK Characterization Core
FIC: Shared
Owner: Bill Rowe
Location: BRK 2100
Maximum Wafer Size:
| Table of Content Zone | ||||||||
|---|---|---|---|---|---|---|---|---|
| ||||||||
|
Overview
General Description
The Olympus BX-60 Microscope can be used for sample inspection in reflection mode. Image capture is obtained though an Insight (18.2 Color Mosaic) CCD camera and "Spot Advanced" software.
Specifications
- Reflection Mode Light Source: 100Watt halogen
- Cube Assemblies: Bright-Field (BF), Dark-Field (DF), and Differential Interference Contrast (DIC).
- Objectives: 5X, 20X, 50X
Technology Overview - Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References